Treatment method of exhaust gas from ultrapure ammonia purification device

Abstract

The invention provides a treatment method of an exhaust gas from an ultrapure ammonia purification device, and relates to a treatment method of an ammonia-containing exhaust gas from the ultra-pure ammonia purification device. A treatment device used in the treatment method comprises a catalytic absorption system, a rectifying tower, a condenser, an ammonia decomposing furnace and an exhaust gas tower, wherein the catalytic absorption system is separately connected with the rectifying tower and the exhaust gas tower; the rectifying tower is connected with the condenser; the condenser is connected with the ammonia decomposing furnace; and the ammonia decomposing furnace is connected with the rectifying tower. By using the treatment method and treatment device, the content of residual ammonia in the exhaust gas is greatly reduced, so that the exhaust gas meets the national emission standard; and a tail gas treated by the tail gas treatment system is primarily a mixed gas of hydrogen and nitrogen, is an ideal gas for the regeneration process of the catalytic adsorption system, and can be used for catalytically reducing a deoxidizing agent and purging and adsorbing a drying agent, thereby saving the consumption of the auxiliary material of the gas for the regeneration process of the catalytic adsorption system, lowering production cost and ensuring the quality of an ultrahigh-purity ammonia product.

Description

Technical field: [0001] The invention relates to a treatment method for ammonia-containing waste gas of an ultra-high-purity ammonia purification device, in particular to the waste gas treatment device and treatment method of the ultra-pure ammonia purification device. Background technique: [0002] Ammonia is not only a very important industrial basic material, but also widely used in semiconductor integrated circuit IC, liquid crystal display LCD, semiconductor light emitting device LED and solar cell PV and other industries. Ordinary first-class industrial ammonia (purity 99.8%) is far from meeting the needs of the optoelectronics industry. The purity of ammonia must reach 99.999% (5N) or 99.9999% (6N), or even 99.99999% (7N). Various impurities in ammonia must be controlled at ppm, ppb or even ppt levels, which poses a great challenge to ammonia purification technology and detection technology. [0003] In recent years, with the gradual reduction of global oil and other...

AI Technical Summary

Problems solved by technology

At present, most of them use low-temperature condensers to recover liquid ammonia or absorb dilute sulfuric acid solution to generate ammonium sulfate for tail gas recovery. This method is costly, and the residual ammonia content after recovery is relatively high, which does not meet the national emission standards.

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