Scheduling method for semiconductor production line based on multi-ant-colony optimization

Abstract

The invention relates to a scheduling method for a semiconductor production line based on multi-ant-colony optimization. The method comprises the following steps of: determining bottleneck processing areas of the semiconductor production line, wherein processing areas, of which average utilization rate exceeds 70 percent, of equipment are regarded as the bottleneck processing areas; setting the number of ant colonies as the number of the bottleneck processing areas, and initializing a multi-ant-colony system; parallelly searching scheduling schemes of all bottleneck processing areas by all ant colony systems; restraining and integrating the scheduling schemes of all bottleneck processing areas into one scheduling scheme for all bottleneck processing areas according to a procedure processing sequence, and deducing the scheduling schemes of other non-bottleneck processing areas by using the scheduling scheme and the procedure processing sequence as restraint to obtain the scheduling scheme of the whole semiconductor production line; and judging whether program ending conditions are met, if so, inputting the scheduling scheme which is optimal in performance, otherwise, updating pheromones of the ant colonies by using the scheduling scheme which is current optimal in performance, and guiding a new round of searching process. The method has the advantages that: an important practical value is provided for solving the optimal dispatching problem of the semiconductor production line; and important instructional significance is provided for improving the production management level of semiconductor enterprises of China.

Description

technical field [0001] The invention relates to a scheduling method for a semiconductor production line based on multi-ant colony optimization. Background technique [0002] In a production system using assembly line workshop processing, a conveyor system transports the WIP along the workbench, and at each workbench, a different process of the WIP is completed. In theory, the WIP visits each station once during a start-to-finish machining run. A semiconductor production line is different from most production systems that use assembly-line shop processing. In the semiconductor production line, WIP may visit the same workbench several times during the processing process. WIP has to go through several cleaning, oxidation, deposition, metal spraying, etching, ion implantation and stripping processes until the semiconductor product is completed. [0003] figure 1 A simplified multi-product semiconductor production line SL1 is given. In this model, two products A, B are manufa...

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Problems solved by technology

[0021] Looking at the existing patents on semiconductor production line scheduling, they are mainly aimed at specific processing areas of semiconductor production lines; in the patents on semiconductor production line scheduling, the method based on rules, or the combination of rules selected by intelligent methods, has not yet been developed. Discovered the patent of directly using the intelligent optimization method to obtain the scheduling scheme of the semiconductor production line

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