Nanoindentation/cutting test device

Abstract

The invention relates to a nanoindentation / cutting test device and belongs to the field of electromechanical integration precise scientific instruments. The nanoindentation / cutting test device comprises an X / Y precise positioning platform, a Z-axis macro-motion adjusting mechanism, a precise indentation driving unit, a load signal detection unit and a displacement signal detection unit, wherein the X / Y precise positioning platform is connected with a coarse adjustment mechanism III15 through a connection plate I2, the adjustment mechanism III15 is fixed on a base 1, and a loading platform 8 is connected with the X / Y precise positioning platform through a force sensor 8; and the precise indentation driving unit is fixed on a side plate I3 through the Z-axis macro-motion adjusting mechanism, and the side plate I3 is fixed on the base 1; and the displacement signal detection unit is fixed on the base 1 through a side plate II14. The nanoindentation / cutting test device has the technical effects of compact structure and small volume. The nanoindentation / cutting test device can be used for realizing the mechanical property test of the three-dimensional test piece of which the characteristic dimension is above the millimeter level (the maximum dimension is up to 20mm*20mm*10mm); and the displacement loading resolution reaches the nanometer level and the loading force resolution reaches the micro-Newton level.

Description

technical field [0001] The invention relates to the field of opto-mechanical-electrical integration precision scientific instruments, in particular to a nano-indentation / scribing test device integrating driving, loading, detection, micro-nano mechanical performance testing and ultra-precision scribing processing. Background technique [0002] Micro-nano mechanical testing technology is a cutting-edge science and technology developed in recent years, mainly including nano-indentation (Nanoindentation), nano-scratch (Nanoscratch), atomic force microscope (AFM), micro-electromechanical system (MEMS) special testing technology ( Such as micro-stretching, etc.) and related support technologies. Among them, the nano-indentation / scratch testing technology is the most widely used, which has played an important role in the above-mentioned many fields, and promoted the researchers' in-depth research on the deformation and damage mechanism of materials. The relevant research...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a nano-indentation / scribing test device, which solves the problem that foreign instruments are bulky and complex in structure, and cannot be placed under observation instruments to realize in-situ nano-indentation testing of materials, many of which are related to material damage and destruction. The information cannot be obtained and other problems, and fill the gaps in this field in our country

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