Laser-induced breakdown spectrum in-situ analyzer

Abstract

A laser-induced breakdown spectroscopy in-situ analyzer belongs to the technical field of material analysis and characterization. Including excitation light source system, laser beam shaping system, spectroscopic system, high-speed signal acquisition system, signal analysis system, sample chamber vacuum system, continuous excitation synchronous scanning positioning system and sample surface imaging system. The laser beam emitted by the laser light source is processed by the beam shaping system and focused on the surface of the analyzed sample that can move in three dimensions. The sample chamber vacuum system provides a closed environment for the analyzed sample to be filled with protective gas. The spectroscopic system and the signal acquisition system are connected to each other through a photomultiplier tube. The plasma spectrum generated on the sample surface is converted into an electrical signal by the optical signal generated by the spectroscopic system through the photomultiplier tube. The data processing system processes and calculates the generated photoelectric signals, and outputs results such as the content of each element in the sample and the in-situ statistical distribution. Advantages over existing technologies are reflected in increased functionality and expanded sample range.

Description

technical field [0001] The invention belongs to the technical field of material analysis and characterization, and particularly relates to a laser-induced breakdown spectrum in-situ analyzer, which can achieve high-speed data acquisition and analysis of spectral signals generated by laser ablation material surfaces, and can realize the detection of elements in block solid materials. Quantitative analysis of content, analysis of the composition distribution of each element in the depth direction of surface treatment materials such as coatings; within a large scale (cm 2 Statistical analysis of distribution uniformity, segregation, density and porosity of each element, surface defect and inclusion analysis, etc. Background technique [0002] The chemical composition of a material and its distribution have a great influence on the properties of the material. The metallurgical process not only needs to know the chemical composition of the material, but also expects to know the ...

AI Technical Summary

Problems solved by technology

However, the current commercialized laser-induced breakdown spectrometer can only measure the composition information of local sampling positions, and cannot automatically realize the in-situ statistical distribution of chemical elements on the material surface, and cannot obtain the spatial coordinates and chemical composition content of any position on the material surface. Corresponding distribution, spatial positioning of maximum and minimum segregation, statistical analysis of apparent density, material analysis of statistical segregation degree, and new information such as element content distribution in the material depth direction

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