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MEMS infrared emission gas-sensitive sensor

A technology of gas sensor and infrared emission, which is applied in the field of gas sensor, can solve the problems of low sensitivity of MEMS gas sensor, limited detectable gas, complex process, etc., and achieve the effect of on-chip integration, simple design and simple process

Active Publication Date: 2013-03-20
北京中科微知识产权服务有限公司
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  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to solve the problems of low sensitivity, limited detectable gas and complex process of MEMS gas sensor, the present invention provides a MEMS infrared emission gas sensor to meet people's requirements for accurate, convenient and low-cost gas analysis

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Embodiment Construction

[0027] In order to make the purpose, technical solutions and advantages of the present invention more clear, the following will be combined with the analysis of chloroform vapor in the ambient gas as a specific example, and with reference to the accompanying drawings, the present invention will be further described in detail.

[0028] Such as figure 1 as shown, figure 1 The structural schematic diagram of the MEMS infrared emitting gas sensor provided for the present invention, the sensor is mainly composed of a gas light emitting tube 1, an absorption gas chamber 2, an emission spectrum splitting array 3, an absorption spectrum splitting array 4, an emission spectrum detection array 5, an absorption spectrum detection array The array consists of 6 etc. parts.

[0029] Such as figure 2 As shown, the gas luminous tube 1 is an open structure made on a silicon wafer, with a platinum electrode 101 inside, and a matching network on the external circuit. After electrification, t...

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Abstract

The invention discloses an MEMS (micro-electromechanical system) infrared emission gas-sensitive sensor. In the MEMS infrared emission gas-sensitive sensor, gas to be detected is excited to emit light so as to analyze emission spectra of the gas to be detected and judge the varieties of the gas, and the concentration of the gas is determined by measuring absorbance. The gas-sensitive sensor comprises a gas luminous tube (1), an absorption gas chamber (2), an emission spectrum light splitting array (3), an absorption spectrum light splitting array (4), an emission spectrum detection array (5) and an absorption spectrum detection array (6), wherein the gas luminous tube (1) is positioned on the middle part of the absorption gas chamber (2); both ends of the absorption gas chamber (2) are provided with the emission spectrum light splitting array (3) and the absorption spectrum light splitting array (4) respectively; the outer side of the emission spectrum light splitting array (3) is further provided with the emission spectrum detection array (5); and the outer side of the absorption spectrum light splitting array (4) is further provided with the absorption spectrum detection array (6). By utilizing the MEMS infrared emission gas-sensitive sensor, the requirements of people on the accuracy, convenience and low cost of gas analysis are met.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a MEMS infrared emitting gas sensor. Background technique [0002] Gas sensors play an irreplaceable role in many fields such as pharmaceuticals, chemicals, food, medical testing, and environmental monitoring. Most of the existing MEMS sensors are sensitive film gas sensors. Most of these sensors use sensitive films to interact with target gases. Selective adsorption causes changes in electrical parameters such as resistance and capacitance of the sensitive membrane or mechanical parameters such as vibration frequency to realize gas detection. Therefore, the key properties such as gas types and sensitivity that can be detected by this type of sensor are often limited by the characteristics of the sensitive membrane material. Combining spectral analysis, the ultimate means of chemical analysis, with MEMS technology is an option to solve the difficulties in sensor development....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/35B81B7/02G01N21/3504G01N21/69
Inventor 高超群景玉鹏
Owner 北京中科微知识产权服务有限公司
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