Method for building silicon-based coupling resonance loop structure capable of providing stimulated Raman scattering light grain
A technology of stimulated Raman scattering and coupled resonance, applied in the directions of light guides, optics, optical components, etc., can solve the problems of no advantage, propagation light loss, etc., to achieve high sensitivity, compensation loss, and enhanced signal-to-noise ratio.
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[0018] Embodiment: Below in conjunction with accompanying drawing, the present invention will be further described. See Figure 4 , the present invention is a method for constructing a silicon-based coupled resonant ring structure that provides stimulated Raman scattering light gain. The specific steps of the method are as follows:
[0019] Step 1. Use ion implantation and other methods to implant oxygen ions under the surface of pure single crystal silicon by controlling the energy of the ion beam, thereby forming a layer of SiO with a thickness of 1 μm at 1.55 μm below the surface. 2 Buried layer, thus making the SOI substrate.
[0020] Step 2. Since in the actual microelectronic etching process, figure 1 The large circular ring waveguide shown is too difficult to realize, so it is designed as image 3 Equivalent optical path shown. That is to replace the peripheral circular closed-loop waveguide with a rectangular closed-loop waveguide, and the small-sized ring waveguid...
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