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Absolute displacement measuring device

A technology of displacement measurement and absolute displacement, which is applied in the direction of measuring devices, instruments, etc., can solve the problems of complex measuring devices and inconvenient absolute displacement measurement, and achieve the effects of small size, adjustable measurement frequency range, and light weight

Active Publication Date: 2011-06-29
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology

[0006] The purpose of the present invention is to provide an absolute displacement measuring device to solve the problem of inconvenient absolute displacement measurement of micro-vibration and complicated measuring device

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Embodiment Construction

[0030] The rotary table proposed by the present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that the drawings are all in a very simplified form and use imprecise ratios, which are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0031] The core idea of ​​the present invention is to provide an absolute displacement measurement device. The absolute displacement measurement device uses a spring vibrator combined with a relative displacement sensor to achieve absolute displacement measurement. At the same time, a low-frequency correction algorithm is used to make the low-frequency characteristics of the device effective Extended, the measurement frequency range can be adjusted, so that the absolute displacement ...

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Abstract

The invention discloses an absolute displacement measuring device. The absolute displacement measuring device comprises a relative displacement detection system, a preprocessing module, an analog-to-digital (A / D) processing module, a low frequency correction module and a phase inverter. The absolute displacement measuring device can expand the lower limit of the measuring frequency of the displacement sensor under the condition of keeping high mechanical natural frequency of the conventional displacement sensor, so that the absolute displacement of an object is convenient to measure, and measuring accuracy is high.

Description

technical field [0001] The invention relates to a precision vibration displacement measuring device, in particular to an absolute displacement measuring device. Background technique [0002] With the development of ultra-fine processing and assembly technology and ultra-precision measurement technology, the influence of micro-vibration becomes more prominent. Precision vibration testing is an essential means for the development of many high-tech products. Vibration displacement measurement is generally tested by the following means: electric spiral displacement meter, capacitive displacement measuring instrument, laser Doppler vibrometer, etc. However, the above measurement methods belong to relative measurement, and it is difficult to obtain the absolute displacement of the measured object. [0003] The "absolute amplitude sensor device" published on February 7, 1996 (Chinese patent publication number CN1116298A) uses a combination of a relative displacement sensor (eddy ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/02
Inventor 杨辅强谢德东袁志扬王保亮
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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