Adjustable nano grating, nano grating accelerometer and processing method of adjustable nano grating or nano grating accelerometer

Abstract

The invention discloses an adjustable nano grating, a nano grating accelerometer and a processing method of the adjustable nano grating or the nano grating accelerometer. The adjustable nano grating comprises a movable sub-grating and a fixed sub-grating, and is processed by adopting a focused ion beam / scanning electron microscope double-beam system, the accuracy is high and the period consistency is good. The movable sub-grating and a plurality of single gratings of the fixed sub-grating are arranged in an upper-lower cross manner, and a beam is connected with mass blocks. The nano grating accelerometer comprises laser light sources, an accelerometer chip and a photoelectric detector; and the accelerometer chip comprises an adjustable nano grating. The adjustable nano grating is used as a central element of a sensing part, and jointly form a sensing head together with the mass blocks and the beam; and the light sources irradiate the adjustable nano grating, the photoelectric detector and a detection circuit are utilized for carrying out signal acceleration detection, and when the acceleration is calculated, the vector diffraction theory is used as a basis. In the invention, the structure is simple and the sensitivity is high.

Description

technical field [0001] The invention relates to an accelerometer device, in particular to an adjustable nanometer grating, a nanometer grating accelerometer and a processing method thereof. Background technique [0002] Nano grating accelerometer is a device used to measure acceleration and acceleration changes. Nano grating accelerometer is based on grating vector diffraction theory and nano processing technology. The scalar theory is relatively successful when the structural size (period, slit depth, etc.) of the grating is much larger than the wavelength of the incident light. However, for sub-wavelength gratings (the size of the grating is close to or smaller than the wavelength of the incident light), its structural size is in the order of wavelength or sub-wavelength. At this time, the assumption of scalar diffraction theory is no longer valid, and strict vector Diffraction theory to analyze and design. The basis of vector diffraction theory is strict electromagneti...

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Problems solved by technology

[0006] (4) In the vector diffraction theory, the polarization state of the incident wave should be considered when calculating the diffraction efficiency, but the polarization state of the incident wave is not considered in the scalar diffraction theory

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