Laser processing device and laser processing method using tool of the laser processing device
A technology of laser processing and processing procedures, applied in the direction of manufacturing tools, metal processing equipment, laser welding equipment, etc., can solve the problems of high cost, rough processing surface, and insufficient dimensional accuracy, etc., to achieve low cost and prolong life , The effect of preventing peeling or chipping
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[0056] Next, refer to Figure 7 An example of actual machining of a tool using the laser machining apparatus of the above embodiment will be described.
[0057] in Figure 7 (a) shows an enlarged image of a Si wafer as an object to be processed, and the surface is processed into a linear surface using the laser processing apparatus of the above embodiment. In addition, in Figure 7 (b) shows an enlarged image of a surface processed in the same manner as conventional laser processing as a conventional example.
[0058] From this result, it can be seen that in the conventional laser processing, the processed shape (cross-section) of the object to be processed is processed to have a wider width than other regions by overlapping many processing marks after the start of processing. On the contrary, in the laser processing of this example, After the processing is started, processing marks are formed at the same intervals as in other areas, and processing is performed with uniform widths ...
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