Discharge ionization current detector
A technology of ionization current and current detection unit, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of high device price and high power supply price, and achieve the effect of low cost
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[0029] Next, a discharge ionization current detector according to an embodiment of the present invention will be described with reference to the drawings. figure 1 It is a schematic configuration diagram of the discharge ionization current detector of this embodiment.
[0030] The discharge ionization current detector 1 of the present embodiment includes a cylindrical tube 2 made of a light-transmitting dielectric such as quartz, and a gas flow path 4 is formed therein. As the cylindrical tube 2, for example, a quartz tube having an outer diameter of Φ3.9 mm can be used. Ring-shaped plasma generation electrodes 5 , 6 , and 7 made of metal (for example, SUS, copper, etc.) are provided around the outer wall surface of the cylindrical tube 2 at predetermined distances from each other. Since the wall surface of the cylindrical tube 2 exists between the electrodes 5, 6, 7 for plasma generation and the gas flow path 4, the wall itself as a dielectric acts as a dielectric covering ...
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