Liquid container, liquid delivering device equipped therewith and liquid delivering method

Abstract

The invention discloses a liquid container, a liquid delivering device equipped therewith and a liquid delivering method. The liquid container can maintain the filled liquid with high quality, wherein the space is saved for storing liquid and the residual liquid is reduced to the minimal amount when the liquid is discharged. According to the liquid delivering device and the liquid delivering method, the installation and replacement operation of the liquid container is operated conveniently, which is simple in structure and low in cost. Meanwhile, the amount of the residual liquid in the container is largely reduced and the liquid is discharged safely. The liquid container (1) comprises a round-bottomed main body (2) and a supporting platform (3) made of thermoplastic resin with a bending elastic rate of at least 700 MPa. The inner surface of the main body (2) is made of thermoplastic resin of high purity and the supporting platform (3) is equipped with a through part (9). According to the liquid delivering device (20) arranged on the liquid container (1), the end (23a) of a liquid feeding pipe (23) is inserted to the round bottom (6) of the container. The upper end and the lower end of the main body (2) are respectively clamped by a protrusion part (32) and a pressing member (34). When gas with a pressure of 200 kPa is supplied, the liquid in the container is discharged.

Description

technical field [0001] The present invention relates to a liquid container for containing liquid, a liquid delivery device for sending liquid out of the liquid container, and a liquid delivery method. Background technique [0002] Liquids such as high-purity chemical solutions for industrial use such as photoresists and solvents used in the semiconductor and liquid crystal fields, high-purity chemical solutions for medical use, and liquids such as food material liquids need to be purified with high purity without contamination of foreign substances. Storage, handling and use. Therefore, it is desired that the liquid container used for storing and transporting these liquids, or the liquid container directly mounted on the liquid delivery device be a container with minimal elution of components. Such a liquid container and a liquid delivery method are described in, for example, Japanese Patent Laid-Open No. 11-290420. [0003] The liquid container described in the above docu...

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Problems solved by technology

[0004] However, in the liquid container described in the above document, it is difficult to discharge the liquid remaining at the bottom of the flat container when the liquid is delivered, and the amount of residual liquid is large.

In addition, there is a technical problem that the liquid containers need to be placed side by side when storing multiple liquid containers or preparing the liquid containers near the liquid delivery device, requiring a large space.

Moreover, since the liquid container needs to be covered with a pressure-resistant protective container when it is installed on the liquid delivery device, the number of parts of the liquid delivery device increases, making it a large-scale and expensive device, and the installation work of the liquid container is difficult. Or replacement operations are also very complicated technical problems

Moreover, when the liquid is sent out using high gas pressure, air bubbles are easily generated in the liquid, so there is a technical problem that a filter for removing air bubbles from the liquid is required in the liquid sending device

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