Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece

Abstract

The invention relates to a coating film supporting mechanism of a high temperature deposition hard mask of a film coating workpiece, belonging to auxiliary equipment of optical coating. The coating film supporting mechanism comprises a film coating tray, a stop dog groove, a workpiece stop dog, a locking screw, a steel ball and a steel ball caulking groove. The middle part of the film coating tray is provided with an opening for placing the film coating workpiece, the four sides of the tray are provided with radial stop dog grooves for installing the workpiece stop dog, the workpiece stop dog moves in the groove, the inclined plane of the workpiece stop dog is embedded with a steel ball (rolling ball), the steel ball rolls in the caulking groove, the workpiece stop dog is fixed in the stop dog groove by the locking screw, the edges of the film coating workpiece are all provided with tapers, the film coating workpiece is placed on the inclined plane of the workpiece stop dog and contacts with the steel evenly, and then the film coating workpiece and the entire device are both placed into a circular ring tray of the film coating machine. The mechanism of the invention can ensure that uniform force is exerted on each steel ball and the workpiece, the position of the stop dog can be freely adjusted in a certain scope according to the dimension of the workpiece; in addition, the chucking power for adjusting the workpiece can be provided by expansion or shrinkage force generated from high temperature or low temperature to drive the steel ball to roll; and the mechanism of the invention features in simple structure and high cost performance.

Description

field of invention [0001] The invention belongs to the field of optical coating technology research, and mainly relates to optical coating auxiliary equipment. Background technique [0002] The infrared light window of the aircraft must not only meet the performance requirements of high optical transmission, but also be able to resist harsh environmental impacts such as rain erosion and sand erosion. For diamond-like carbon film, the temperature must be above 200°C during coating. [0003] To coat the diamond-like carbon film on the full diameter of the outer surface of the infrared window, the coating auxiliary mechanism (workpiece installation fixture, etc.) cannot block the coating area of ​​the workpiece, and all the edges of the infrared window in the coating workpiece are chamfered. The workpiece can be supported by chamfering. However, the linear expansion coefficient of medium-wave or long-wave infrared crystal materials (such as MgF2, ZnS) is quite different from ...

AI Technical Summary

Problems solved by technology

When the coating machine is heated, the workpiece mounting fixture expands greatly, while the infrared crystal expands slightly, and the workpiece will fall for a certain distance in the mounting fixture; when the coating finishes cooling down, the workpiece mounting fixture shrinks greatly, and the infrared crystal shrinks small, such as Can't make it move on its own, easily crushes expensive IR window

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