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Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof

A micro-electromechanical, microwave frequency technology, applied in the direction of frequency measurement devices, TV system components, frequency to amplitude conversion, etc., can solve the problems of small signal amplitude, DC power consumption, etc., to improve accuracy, offset loss, The effect of a large dynamic range

Inactive Publication Date: 2012-04-11
SOUTHEAST UNIV
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Problems solved by technology

Traditional microwave frequency detectors are based on diodes, which have the disadvantages of consuming DC power and measuring relatively small signal amplitudes

Method used

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  • Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof
  • Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof
  • Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof

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Embodiment Construction

[0033] like figure 1 As shown, the microwave antenna receives the microwave signal to be tested and inputs it to port 1 of the one-to-three power splitter, and three identical signals (signal 1, signal 2, and signal 3) are generated at port 2, port 3, and port 4. . Signal 1, coplanar waveguide transmission line, MEMS cantilever beam capacitive microwave power sensor and MEMS thermoelectric microwave power sensor are cascaded to form the amplitude detection part of the microwave signal; signal 2, signal 3, coplanar waveguide transmission line, two-in-one power combiner , the MEMS cantilever beam capacitive microwave power sensor and the MEMS pyroelectric microwave power sensor are cascaded to form a phase difference detection part of the microwave signal. Signal 1 is used as the amplitude detection signal, and the amplitude of the signal is detected by the MEMS cantilever beam capacitive microwave power sensor and the MEMS pyroelectric microwave power sensor; signal 2 and sign...

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Abstract

The invention relates to a wireless-receiving system for detecting microelectronic mechanical microwave frequency and a preparation method thereof. The wireless-receiving system for detecting the microelectronic mechanical microwave frequency has quite simple structure, large measurement magnitude range, no direct-current power consumption and easy integration. In the system for detecting the microelectronic mechanical microwave frequency, gallium arsenide is used as a substrate, wherein a microwave antenna (A), a one-three power splitter (B), a coplanar waveguide transmission line (C), a two-in-one power combiner (D), an MEMS cantilever capacitive microwave power sensor (E) and an MEMS thermoelectric microwave power sensor (F) are designed on the substrate; and then a phase difference between a signal 3 and a signal 2 after the signal 3 passes through the coplanar waveguide transmission line with the length of lambda / 2 can be determined according to a law of cosines. Because the phase difference corresponds to the frequency of the signal, the frequency of the signal can be measured.

Description

technical field [0001] The invention proposes a wireless receiving microwave frequency detection system based on micro-electro-mechanical system (MEMS) technology, which belongs to the technical field of micro-electro-mechanical systems. Background technique [0002] In microwave research, microwave frequency is an important parameter to characterize microwave signal, and the detection of microwave frequency occupies a very important position in microwave wireless application and measurement technology. Traditional microwave frequency detectors are based on diodes, which have the disadvantages of consuming DC power and measuring relatively small signal amplitudes. In the past 20 years, with the rapid development of MEMS technology, in-depth research on the structure of MEMS cantilever beams has made it possible to use MEMS technology to realize microwave frequency detection systems. Contents of the invention [0003] Technical problem: The purpose of this invention is to ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R23/02G01R23/06B81B7/02B81C1/00
Inventor 廖小平王德波易真翔
Owner SOUTHEAST UNIV
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