Semiconductor process monitoring method based on independent component analysis and Bayesian inference
An independent component analysis and process monitoring technology, applied in the direction of electrical program control, comprehensive factory control, comprehensive factory control, etc., can solve the problems that cannot meet the requirements of semiconductor process monitoring, unfavorable implementation of semiconductor process automation, and cannot achieve satisfactory monitoring results. Achieve effects that are conducive to automation implementation, enhance understanding ability and operational confidence, and improve monitoring effect
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[0023] Aiming at the monitoring problem of semiconductor process, the invention first uses a distributed control system to collect batch data under different operating conditions, and divides them into operating conditions. Then, according to different operating conditions, a corresponding independent component analysis model is established, and two monitoring statistics I 2 and SPE and their corresponding statistical limits I lim 2 and SPE lim . Store all process model parameters in the database for future use. When monitoring a new batch of data, first use the monitoring model under different operating conditions to monitor it and obtain the corresponding monitoring results. Then the posterior probability of the working condition of the data is obtained through the Bayesian inference method, combined with the failure probability under each working condition, it is integrated into the final monitoring result. In addition, the present invention can also obtain the working...
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