Processing device used for vacuum coating

Abstract

The invention provides a processing device used for vacuum coating. The device comprises a cabinet body, a processing board and an evaporation source, wherein the cabinet body takes a hollow structurethat forms a sealing cavity; and the evaporation source and the processing board are arranged in the sealing cavity and the processing board is arranged above the evaporation source. Besides, the device also comprises a baffle mechanism and the baffle mechanism comprises a baffle, magnetofluid, a cooling shaft and a baffle driving mechanism, wherein the magnetofluid is arranged on the cabinet body; the baffle driving mechanism is arranged outside the cabinet body and connected with one end of the cooling shaft; the other end of the cooling shaft passes through the magnetofluid by pivotal connection and extends into the sealing cavity; the baffle is fixedly connected with the cooling shaft and arranged in the sealing cavity and between the evaporation source and the processing board, and isolates or opens the spatial join of the evaporation source and the processing board; and the baffle driving mechanism drives the cooling shaft and the cooling shaft drives the baffle to rotate. On the one hand, the processing device can improve the quality of a substrate coated layer to a maximum degree, and on the other hand, the normal service life of the processing device can be prolonged to amaximum degree.

Description

technical field [0001] The invention relates to a processing device for vacuum coating, in particular to a processing device for vacuum coating suitable for removing impurities in the vacuum coating process in organic light emitting diodes. Background technique [0002] OLED stands for Organic Light-Emitting Diode (Organic Light-Emitting Diode), also known as Organic Electroluminescence Display (OELD). Because of its thinness, power saving and other characteristics, it has been widely used on the display screen of digital products, and has great market potential. At present, the application of OLED in the world is focused on flat panel display, because OLED is the only one in the application A technology that can be compared with TFT-LCD, OLED is the only display technology that can produce large-size, high-brightness, and high-resolution soft screens among all current display technologies, and can be made into the same thickness as paper. Among them, in the OLED production...

AI Technical Summary

Problems solved by technology

When in use, during the heating process before the OLED substrate is coated, there will be an evaporation source to evaporate the impurities before the evaporation temperature of the evaporator is reached, so that the evaporated impurities are first deposited on the surface of the substrate, causing the substrate The composition of the coating layer is impure, which affects the stability of the substrate performance and the firmness of the connection between the coating layer and the surface of the substrate

At the same time, because some evaporators will release gas during the heating and evaporation process, the pressure in the sealed cavity will rise, and the sealed cavity of the processing device will be subjected to different pressures, resulting in extremely uneven coating layers on the substrate, which will eventually affect the substrate. quality and normal lifespan

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