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Controllable temperature sample table with controllable temperature range of 77K to 400K

A sample stage and range technology, applied in temperature control, non-electric variable control, control/regulation system, etc., can solve the problem of only heating up, and achieve the effect of wide temperature change range, simple structure, and fast dynamic response to temperature change.

Inactive Publication Date: 2010-03-10
BEIHANG UNIV
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Problems solved by technology

Although there are many temperature-variable sample stages suitable for scanning electron microscopy at home and abroad, some of them can only heat up, and some sample stages of biological scanning electron microscopes can only be above 200K, and the large-scale temperature-variable sample stages suitable for dual-beam systems are still available. rarely reported

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  • Controllable temperature sample table with controllable temperature range of 77K to 400K
  • Controllable temperature sample table with controllable temperature range of 77K to 400K
  • Controllable temperature sample table with controllable temperature range of 77K to 400K

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Embodiment Construction

[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0019] see figure 1 As shown, a temperature-controllable sample stage suitable for electron beam-ion beam micro-nano processing system of the present invention, the temperature-controllable sample stage is composed of a temperature-controlled sample stage 1 and a liquid nitrogen cooling assembly 6, and the liquid nitrogen cooling assembly 6 provides a cooling medium for the temperature-controlled sample stage 1; the output of liquid nitrogen is realized through the liquid nitrogen flow regulating assembly 7 between the temperature-controlled sample stage 1 and the liquid nitrogen cooling assembly 6 . The temperature-controllable sample stage is based on the addition of a temperature-controlled sample stage 1 and a liquid nitrogen cooling assembly 6 in the existing electron beam-ion beam micro-nano processing system. The temperature-controlled sample stage 1 i...

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Abstract

The invention discloses a controllable temperature sample table with the controllable temperature range of 77K to 400K, comprising a temperature control sample table and a liquid nitrogen cooling assembly, wherein the liquid nitrogen cooling assembly is used for providing a cooling medium to the temperature control sample table which is installed on a scanning electron microscope sample table; theliquid nitrogen cooling assembly is arranged outside a vacuum chamber; and in a processing course, the scanning electron microscope sample table is not tilted or rotated in a large range, thereby simplifying the operation step in processing micro nano materials. The temperature control sample table is used for continuously controlling the temperature of a sample to be measured by the common action of liquid nitrogen and coil heating. The controllable temperature range is from 77K to 400K and the temperature control precision is 0.1K.

Description

technical field [0001] The invention relates to a sample stage, more particularly, to a temperature-controllable sample stage suitable for an electron beam-ion beam micro-nano processing system. The temperature-controllable sample stage is composed of a temperature-controlled sample stage and a liquid nitrogen cooling component, and the liquid nitrogen cooling component provides a cooling medium for the temperature-controlled sample stage. Background technique [0002] With the continuous improvement of productivity, the energy problem has become the main challenge faced by human beings, and the miniaturization of products is one of the means to solve the energy crisis. Therefore, nanotechnology has become a research hotspot in the world. Nanotechnology is a complete system integrating cutting-edge basic disciplines and high technologies, including nanomanufacturing technology, nanometering, nanosystem physics, nanochemistry, nanobiology, nanomaterials, nanoelectronics and n...

Claims

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Application Information

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IPC IPC(8): B82B3/00G05D23/20
Inventor 崔益民王荣明
Owner BEIHANG UNIV
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