Controllable temperature sample table with controllable temperature range of 77K to 400K
A sample stage and range technology, applied in temperature control, non-electric variable control, control/regulation system, etc., can solve the problem of only heating up, and achieve the effect of wide temperature change range, simple structure, and fast dynamic response to temperature change.
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[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0019] see figure 1 As shown, a temperature-controllable sample stage suitable for electron beam-ion beam micro-nano processing system of the present invention, the temperature-controllable sample stage is composed of a temperature-controlled sample stage 1 and a liquid nitrogen cooling assembly 6, and the liquid nitrogen cooling assembly 6 provides a cooling medium for the temperature-controlled sample stage 1; the output of liquid nitrogen is realized through the liquid nitrogen flow regulating assembly 7 between the temperature-controlled sample stage 1 and the liquid nitrogen cooling assembly 6 . The temperature-controllable sample stage is based on the addition of a temperature-controlled sample stage 1 and a liquid nitrogen cooling assembly 6 in the existing electron beam-ion beam micro-nano processing system. The temperature-controlled sample stage 1 i...
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Abstract
Description
Claims
Application Information
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