Wafer fixing device and wafer fixing method
A wafer fixing, wafer technology, applied in semiconductor/solid state device manufacturing, electrical components, circuits, etc.
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[0041] In order to enable those skilled in the art to better understand the solution of the present invention, and to make the above-mentioned purpose, features and advantages of the present invention more obvious and comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0042] The invention provides a wafer fixing device, which can fix the blue film carrying the wafer by means of vacuum adsorption. Such as figure 1 As shown, in a preferred embodiment of the present invention, the wafer fixing device 10 includes a wafer fixing ring 101 and an adsorption device 102, and the wafer fixing ring 101 and the adsorption device 102 hold the wafer fixing ring 101 by a snap-fitting device. fixed on the adsorption device 102. The wafer fixing ring 101 includes an inner ring 1011 , an outer ring 1012 and an annular base portion 1014 . In one embodiment, the inner ring 1011 , the outer ring 1012 a...
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