Method for plating glasses to a large area without pollution
A large-area, non-polluting technology, applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc., can solve the problems of many production equipment, complex silver mirror plating, and large consumption of raw materials. Small amount, accurate film thickness, and extended service life
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[0034] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0035] This specific embodiment is only an explanation of the present invention, and it is not a limitation of the present invention. Those skilled in the art can make modifications to this embodiment without creative contribution as required after reading this specification, but as long as they are within the rights of the present invention All claims are protected by patent law.
[0036] A method for plating a large-area silver mirror without pollution, comprising the following steps: a device such as figure 1 , The disk-shaped intermediate frequency DC composite magnetron sputtering device shown in 2 and 3 includes a vacuum chamber 1, an air extraction system, an air supply system, a film thickness measurement and control system, and an electrical control cabinet (not shown), the A DC planar magnetron sputtering target 2 is installed in the vacuum chamber...
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