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Liquid ejecting head, liquid ejecting apparatus, and actuator

一种液体喷射头、喷射液的技术，应用在压电器件/电致伸缩器件、压电/电致伸缩/磁致伸缩器件、用于压电器件或电致伸缩器件的材料选择等方向，能够解决压电体层锥形部破坏等问题

Inactive Publication Date: 2009-09-30
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] For example, in the structure described in Patent Document 2, although the upper electrode is not formed on the portion (hereinafter referred to as the tapered portion) that is the inclined surface of the piezoelectric layer, the lower electrode is continuous across the plurality of piezoelectric elements. Therefore, a strong driving electric field may also act on the tapered portion of the piezoelectric layer, which may cause damage to the tapered portion of the piezoelectric layer.

Method used

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  • Liquid ejecting head, liquid ejecting apparatus, and actuator
  • Liquid ejecting head, liquid ejecting apparatus, and actuator
  • Liquid ejecting head, liquid ejecting apparatus, and actuator

Examples

Experimental program
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Effect test

Embodiment approach 1

[0039] figure 1 It is an exploded perspective view showing a schematic structure of an ink jet recording head as an example of the liquid ejecting head according to Embodiment 1 of the present invention, figure 2 (a) and (b) are figure 1 The plan view and the A-A' sectional view of the plan view.

[0040] As shown in the figure, the channel forming substrate 10 is formed of a single crystal silicon substrate having a crystal plane direction of (110) in this embodiment, and an elastic film 51 made of an oxide film is formed on one surface thereof. On the flow path forming substrate 10 , a plurality of pressure generating chambers 12 partitioned by the partition wall 11 and having an elastic film 51 on one surface are arranged side by side in the width direction thereof.

[0041] An ink supply passage 13 and a communication path 14 which are divided by partition walls 11 and communicate with the respective pressure generating chambers 12 are provided on one end side in the long...

Embodiment approach 2

[0082] Figure 8 It is a cross-sectional view showing main parts of the ink jet recording head according to the second embodiment.

[0083] This embodiment is another example of the structure of the lower electrode film 60 , and the structure other than the lower electrode film 60 is the same as that of the first embodiment. That is, in Embodiment 1, the orientation control layer 62 is formed on the conductive layer 61 (upper surface). Figure 8 As shown, in this embodiment, the orientation control layer 62A is provided to cover the upper surface and the end surface of the conductive layer 61 , that is, to cover the conductive layer 61 .

[0084] With such a structure, since the piezoelectric layer 70 is formed on the orientation control layer 62A even at the end surface of the lower electrode film 60, the crystallinity of the piezoelectric layer 70 near the end of the lower electrode film 60 is further improved. .

Embodiment approach 3

[0086] Figure 9 It is an exploded perspective view showing a schematic structure of an ink jet recording head according to Embodiment 3, Figure 10 (a) and (b) are Figure 9 and the BB' section of the plan. in addition, Figure 11 It is a cross-sectional view showing main parts of the ink jet recording head according to the third embodiment. right with Figure 1 ~ Figure 3 Components that are the same as those shown are assigned the same reference numerals and duplicate descriptions are omitted.

[0087]This embodiment is the same as Embodiment 1 except that the common electrode of the piezoelectric element 300 is formed of the lower electrode film 60A constituting the piezoelectric element 300 and the dedicated electrode is formed of the upper electrode film 80A.

[0088] As shown in the figure, the lower electrode film 60A of the present embodiment extends from one end in the longitudinal direction of each pressure generating chamber 12 in each region facing each press...

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PUM

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Abstract

The invention provides a liquid ejecting head, a liquid ejecting apparatus and an actuator capable of improving shift characteristics of piezoelectric element to implement high-speed driving and preventing damage of the piezoelectric layer to improve durability. A end face of a piezoelectric layer (70) is composed of inclined planes in a incline mode of end of a lower electrode side is outsider than a upper electrode side. The lower electrode (60) for composing piezoelectric elements has a width smaller than the width of the pressure generating chambers (12). The piezoelectric layer (70) has a larger width than the lower electrode (60) to cover end faces of the lower electrode (60). The vibration plate (50) has a top layer formed of a titanium oxide (TiOx) insulator film (52). The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer (62). The piezoelectric layer (70) is formed of columnar crystals, and one part of the piezoelectric layer (70a) disposed on the insulator film (52) has a smaller average grain size than the other part of the piezoelectric layer (70b) disposed on the orientation control layer (62).

Description

technical field [0001] The present invention relates to a liquid ejection head, a liquid ejection device, and an actuator having a piezoelectric element that eject liquid droplets from a nozzle by displacement of a piezoelectric element. Background technique [0002] Among the ink jet type recording heads which are typical examples of liquid ejection heads for ejecting liquid droplets, some ink jet type recording heads have, for example, a piezoelectric element provided in a pressure generating chamber formed with a vibrating plate interposed therebetween. The inkjet type recording head is composed of a lower electrode, a piezoelectric layer, and an upper electrode on one side of a channel-forming substrate. The displacement of the piezoelectric element in the inkjet type recording head applies pressure to the pressure generating chamber, thereby releasing the pressure from the nozzle. Eject ink droplets. It is known that the displacement characteristics of piezoelectric el...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/14B41J2/045B41J2/055B41J2/135H01L41/09H01L41/18H01L41/22H01L41/29H01L41/319H01L41/39
CPCB41J2/161B41J2/1623B41J2/1646B41J2002/14419B41J2/14233B41J2002/14241B41J2/1629B41J2/1645
Inventor 岛田胜人
Owner SEIKO EPSON CORP
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