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Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof

A piezoelectric scanning tube and dual piezoelectric technology, applied in the direction of electric solid devices, piezoelectric devices/electrostrictive devices, semiconductor devices, etc. Large and other problems, to achieve the effect of simple structure and control, large temperature zone, and large driving force

Inactive Publication Date: 2009-09-02
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem that the existing nano-precision stepper cannot have small size, simple and firm structure, large driving force and large working temperature range at the same time, a three-friction stepper with double piezoelectric bodies pushed side by side and a three-friction stepper made of it are provided. Scanning probe microscope body capable of working in small spaces

Method used

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  • Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof
  • Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof
  • Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Example 1: Three-friction stepper driven by basic double piezoelectric bodies side by side

[0051] See attached figure 1 , a basic three-friction stepper with double piezoelectric bodies pushed side by side, including two piezoelectric bodies 3 and 4, a base 2 and a slide bar 1, and the two piezoelectric bodies are parallel to each other with their expansion and contraction directions 3b and 4b Set side by side and fixedly stand on the base 2, set the slide bar 1 for sliding cooperation with the two piezoelectric bodies on their telescopic directions 3b and 4b, set the slide bar perpendicular to the telescopic directions 3b and 4b of the two piezoelectric bodies 1 The normal pressure 3a and 4a that press the free ends of the two piezoelectric bodies and the normal pressure 2a that presses the slider 1 and the base 2, the maximum of the three normal pressures 2a, 3a and 4a on the slider 1 Among the static friction forces, any one of the maximum static friction forces i...

Embodiment 2

[0056] Example 2: Three-friction stepper driven by elastic double piezoelectric bodies side by side

[0057] In Embodiment 1, the positive pressure for pressing the sliding rod 1 against the free ends of the two piezoelectric bodies and the positive pressure for pressing the sliding rod 1 against the base 2 can be realized by elastic bodies. The elastic body can be fixed to one of the above-mentioned pressing two sides, or not fixed to both sides (for example, in image 3 The tube-shaped slide bar 1 places a spring that pushes the cut parts of the two ends of the slide bar 1 outward, so as to press the piezoelectric bodies 3 and 4 and the base 2 that are sleeved outside the slide bar 1, or place a spring on the slide bar between the piezoelectric body and the spring sheet), or simply the elasticity of the slider 1 or the base 2 or the two piezoelectric bodies (such as figure 1 and image 3 ). That is to say, the slider 1 is elastically pressed against the base 2 through the...

Embodiment 3

[0058] Example 3: Triple-friction stepper driven side by side by integrated dual piezoelectric bodies

[0059] The two piezoelectric bodies 3 and 4 in the above embodiment can be different parts of a complete piezoelectric body, and the two piezoelectric bodies 3 and 4 can also be different parts of a complete piezoelectric body with the base 2, Both can be realized by dividing the electrodes and cutting the piezoelectric body, as long as the expansion and contraction of the two piezoelectric bodies are independently controllable. For example, see attached Figure 5 , the outer electrode of a complete tubular piezoelectric body is divided into two semi-tubular electrodes by the electrode gap 7, cut into the piezoelectric tube along the piezoelectric body electrode gap 7 but not completely cut to form a piezoelectric body slit 8, cut Part of the two semi-tubular piezoelectric bodies constitute the two piezoelectric bodies 3 and 4 , while the uncut part can be used as the base ...

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Abstract

The invention relates to a three-friction stepper for juxtaposedly pushing double piezoelectrics and a scanning probe microscope thereof, in particular to a piezoelectric locator comprising two piezoelectrics, a base and slide bars, wherein the two piezoelectrics which are parallel in the telescopic direction are juxtaposedly fixed and elevated on the base; the slide bars which are in sliding match with the two piezoelectrics in the telescopic direction are provided; positive pressures which enable the slide bars and the free ends of the two piezoelectrics as well as the slide bars and the base to be pressed are arranged in the telescopic direction vertical to the two piezoelectrics; in the largest breakout friction to the slide bars, which is generated by the three positive pressures, any largest breakout friction is smaller than the sum of other two frictions; the slide bars press the base and the free ends of the two piezoelectrics through elastic force or electromagnetic force, the two piezoelectrics can be arranged integrally, and a piezoelectric scanatron fixed on the base is coated outside the stepper, thus a scanning probe microscope body which can work in a small space is formed. The invention has small size, simple and firm structure, and large working temperature zone and driving force, is suitable for various extreme physical conditions and approaches an ideal stepper.

Description

technical field [0001] The invention relates to a piezoelectric stepper, in particular to a three-friction stepper driven by double piezoelectric bodies side by side and a scanning probe microscope mirror made of the same, which belongs to the technical field of piezoelectric positioners. Background technique [0002] At the same time, it has nano-level positioning accuracy, millimeter-level large stroke, large working temperature range from ultra-low temperature to higher than room temperature, large driving force, small size, simple and firm structure and simple and reliable control. It is a coveted positioning tool for atomic / molecular manipulation and even subatomic structure imaging, especially in the field of nanoscience research under extreme physical conditions such as ultra-low temperature and ultra-strong magnetic field, it is even more inseparable from such an ideal positioning device. For example, ultra-low temperature conditions can generally only be obtained in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L25/04H01L41/09G01N13/10G12B21/20H10N30/20
Inventor 王琦陆轻铀
Owner UNIV OF SCI & TECH OF CHINA
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