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Instantaneous phase-shifting secondary interference confocal measuring device and method

A technology of phase-shifting interference and measuring devices, which is applied in the direction of measuring devices, optical devices, instruments, etc., to achieve the effect of reducing mechanical phase-shifting errors and strong anti-vibration ability

Inactive Publication Date: 2009-09-02
HARBIN INST OF TECH
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Problems solved by technology

[0008] The purpose of the present invention is to overcome the impact of environmental vibration, air disturbance and mechanical phase shift error on the ultra-precision measurement of secondary phase shifting interference confocal in the existing time phase shifting interference confocal measurement technology, and to provide an instantaneous phase shifting interference secondary Confocal measurement device and method

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  • Instantaneous phase-shifting secondary interference confocal measuring device and method
  • Instantaneous phase-shifting secondary interference confocal measuring device and method
  • Instantaneous phase-shifting secondary interference confocal measuring device and method

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Embodiment Construction

[0020] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0021] like figure 1 As shown, the instantaneous phase-shift interference secondary confocal measurement device includes: a laser 1, a focusing objective lens 2, an illumination pinhole 3, a beam expanding collimating objective lens 4, a half-wave plate 5, a polarizing beam splitter 6, a first four One-wave plate 7, plane mirror 8, second quarter-wave plate 9, detection focusing objective lens 10, micro driver 11, synchronous phase shifting module 12, first collecting objective lens 13, second collecting objective lens 14, Three collection objective lens 15, first detection pinhole 16, second detection pinhole 17, third detection pinhole 18, first photodetector 19, second photodetector 20, third photodetector 21; The fast axis directions of the one quarter wave plate 7 and the second quarter wave plate 9 are all at an angle of 45° with the horizonta...

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Abstract

The invention relates to an instantaneous phase-shifting secondary interference confocal measuring device and a method, belonging to the field of measurement of ultra-precise three-dimensional microstructure surface topography. The measuring device comprises a synchronous phase-shifting module, wherein three sides of the module are respectively provided with identical interference signal receivers, and each interference signal receiver comprises a collecting objective lens, a detection pinhole and a photodetector; the measuring device controls the three interference signal receivers to synchronously collect output signal under a first confocal measuring condition and a second confocal measuring condition, and the confocal micro-displacement measurement is completed by a three-step phase-shifting algorithm. The invention integrates the characteristics of phase-shifting secondary confocal technology and synchronous phase-shifting technology, realizes the ultra-precise high-speed dynamic measurement and has the advantages of strong anti-vibration capability and low phase-shifting error.

Description

technical field [0001] The invention belongs to the field of ultra-precision three-dimensional microstructure surface topography measurement, and mainly relates to an instantaneous phase-shift interference secondary confocal measurement device and method. Background technique [0002] Confocal measurement technology was first proposed by M. Minsky in 1957, and obtained a US patent in 1961, the patent number US 3013467, the basic technical idea is to suppress stray light by introducing a pinhole detector, and realize the ability of axial tomography , and the lateral resolution of confocal microscope is 1.4 times that of ordinary microscope. After nearly 50 years of development, confocal microscopy technology has made great progress and progress on the basis of basic confocal microscopy. Various types of confocal microscopy devices and technologies are emerging. At present, confocal microscopy measurement technology has been widely used in micro Optics, microelectronics, micr...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/02G01B11/24
Inventor 刘俭谭久彬刘涛赵晨光王伟波
Owner HARBIN INST OF TECH
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