Aspheric surface detecting instrument
An aspheric surface and detector technology, applied in instruments, measuring devices, optical devices, etc., can solve the problems of low detection accuracy and efficiency of optical aspheric surfaces, and achieve the effect of improving measurement accuracy
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[0020] The embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0021] see figure 1 with 2 , the present invention is equipped with a granite structure frame 0, a granite ultra-precision detection platform 1, an automatic focusing non-contact laser displacement measuring head 2, a grating contact displacement measuring head 3, a computer 4, a four-axis motion control card 5, a driver 6, and a press Electric ceramic motor 7, XYZ axis motion mechanism 8 and grating ruler 9.
[0022] The XYZ three-axis movement mechanism 8 is installed and fixed on the granite structure frame 0, the automatic focusing non-contact laser displacement measuring head 2 and the grating contact displacement measuring head 3 are respectively installed and fixed on the Z-axis movement mechanism, and the granite ultra-precision detection platform 1 is set On the X-axis motion mechanism; the XYZ three-axis motion mechanism 8 is equipped wit...
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