Vacuum electron beam melting furnace for polysilicon purification

Abstract

The invention provides a vacuum electron beam melting furnace for polysilicon purification. The melting furnace is characterized in that a melting chamber is square or cylindrical, a chamber wall is of a double water cooling structure or a coil water cooling structure; an electron gun is vertically and downwardly or horizontally arranged on the chamber wall of the melting chamber, a vacuum systemis arranged at the rear of the melting chamber; an isolating valve is arranged between a feeding chamber and the melting chamber of a feed mechanism, and an inflation valve of an inflation system is arranged at the other side of the melting chamber; a discharge mechanism is arranged at the bottom of the melting chamber and connected with an ingot-pulling mechanism; the ingot-pulling isolating valve is arranged between discharge mechanism and the melting chamber; the melting chamber is internally provided with a water cooling crucible and a crystallizing crucible; all high-voltage devices of ahigh-voltage power supply of an electrical control system are arranged at a fuel tank filled with a transformer; and by adopting oil insulation of the transformer, the high-voltage power supply is connected with an electric cabinet which is connected with a console. The melting furnace has the advantages that a plurality of elements can be purified simultaneously, the production efficiency is high, energy consumption is low, energy-saving effect is excellent, and large-scale and automatic operation is easy to be implemented.

Description

technical field [0001] The invention relates to polysilicon purification equipment, in particular to a vacuum electron beam melting furnace for polysilicon purification. Background technique [0002] At present, the global energy shortage, the demand for solar energy has increased significantly, and the demand for high-purity silicon wafers for manufacturing solar cells has also increased significantly. The original purification method mainly uses metal silicon with a silicon content greater than 99% as a raw material, purifies it by gas phase distillation purification, and then obtains a higher purity silicon material through solidification treatment. This material is mainly used in the semiconductor industry, and the leftovers left after slicing can be used as materials for solar cells. The amount of such leftovers is limited and cannot meet the requirements for producing solar cells. In addition, this method inevitably produces a large amount of substances that pollute t...

AI Technical Summary

Problems solved by technology

[0003] In addition, the Chinese publication number is CN101169311A, and the patent application titled "Electron Beam Vacuum Melting Furnace" discloses an electron beam vacuum smelting furnace for smelting refractory metal titanium. Due to the different application objects, this equipment is different from this The devices proposed by the invention have great differences in their principles and structures

Images