Gas detecting method and gas sensor based on plane annular micro-cavity
A ring-shaped microcavity and gas detection technology, applied in the direction of color/spectral characteristic measurement, etc., can solve problems such as difficult control of absorption optical path, detection constraints, and inability to measure gas concentration quickly and accurately, achieving strong scalability and real-time Effect of detecting and saving diffusion time
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[0020] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0021] The present invention is based on the gas sensor of planar annular microcavity and tapered optical fiber structure, comprises optical fiber, laser emitter 4, optical filter 5, beam splitter 6, absorption gas chamber 7, vacuum chamber 8, photodetector 9 and signal Processor 10;
[0022] The optical fiber is a double-tapered optical fiber; each of the absorption chamber and the vacuum chamber has a coupler composed of a planar annular microcavity and a biconical optical fiber, and the planar annular microcavity of the coupler is located in the described The tapered region of bitapered fiber, such as figure 1 and figure 2 shown. The coupler in the absorption gas chamber is a detection gas coupler, and the coupler in the vacuum chamber (8) is a coupler in a vacuum environment.
[0023] ●The absorption gas chamber is composed of a detection gas ...
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