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Method for measuring thickness of wire-shaped narrowband filtering PSD thermal radiation plate

A technology of linear laser and thermal radiation plate, which is used in measurement devices, optical devices, instruments, etc.

Inactive Publication Date: 2009-02-25
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] The purpose of the present invention is to solve the limitations of the single optical path structural optical triangulation method and the problem of large errors in the point light source, and propose a linear laser narrow-band filter PSD thermal radiation plate thickness measurement method

Method used

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  • Method for measuring thickness of wire-shaped narrowband filtering PSD thermal radiation plate
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  • Method for measuring thickness of wire-shaped narrowband filtering PSD thermal radiation plate

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Embodiment 1

[0051] Embodiment 1: single optical path measurement method

[0052] Such as figure 1 As shown, the present invention uses a linear laser as the light source, and the laser spot is linear, which has its advantages compared with other shapes of lasers. PSD can easily receive the laser reflected by the sample and make the positioning of the spot accurate.

[0053] The rest of the structure is the same as that in the background art, wherein, 1. a linear laser, 2. a narrow-band filter, 3. a lens, and 4. a PSD position sensor.

Embodiment 2

[0054] Embodiment 2: Dual optical path measurement method

[0055] Such as Figure 5 As shown, the sample 12 to be tested is fixed on the displacement frame 10, and the stepper motor 8 drives the displacement frame to move along the guide rail 11 at a certain speed through the transmission shaft 9, so as to realize real-time dynamic measurement of the thickness of the sample to be measured.

[0056] First, the setting and calibration of the measurement optical path, the standard sample of known thickness h is placed on the mobile frame 10, and two pairs of thickness measuring probes 5 are symmetrically arranged on both sides of the standard sample. Optical sheet, lens, PSD position sensor and signal processing circuit board; make the linear laser inside the thickness measuring probe emit linear laser and shoot it on the standard sample, and the reflected laser light passes through the narrow-band filter inside the probe and then converges through the lens. Finally, a spot is ...

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Abstract

The invention provides a method for measuring the thickness of a linear laser narrowband filter PSD heat radiation plate. The measurement method comprises the following steps: a linear laser emits a laser to irradiate the surface of a sampling; the light diffused from the surface of the sampling irradiates onto a PSD photosensitive surface through a narrowband filter plate and a lens; the signals of two paths of currents are output from the two sides of PSD under the action of the light; and the current signals output by PSD are processed to acquire the measured thickness. The measurement system adopts the double optical path structure optical differential measurement method which plays a certain compensation role in the angle error caused by angle inclination in the measurement system. Therefore, the method is relatively suitable for real-time non-contact measurement in a rugged industrial production environment.

Description

【Technical field】 [0001] The invention belongs to the technical fields of optical measurement and photoelectric detection. In particular, the PSD photoelectric position sensor is used to measure the thickness of the heat radiation steel plate by the optical differential method. 【Background technique】 [0002] In industrial production, the traditional offline contact measurement method can only measure the size of raw materials, parts, etc., but cannot measure the size of products on the production line in real time. If the products on the production line can be measured in real time, it will be The waste of raw materials can be reduced, the production cost can be reduced, and the production efficiency can be improved. [0003] One of the most widely used non-contact measurement methods is the single optical path structured optical triangulation method. [0004] When using the traditional single optical path structure (laser vertical incidence) optical triangulation method ...

Claims

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Application Information

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IPC IPC(8): G01B11/06
Inventor 刘铁根张铫阳鑫李宝强江俊峰
Owner TIANJIN UNIV
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