Combined bell glass washer and operation method thereof

Abstract

The invention discloses a combined bell jar cleaner for bell jar, which comprises a box body, a horizontal quartz bell jar cleaner and a vertical quartz bell jar cleaner; the horizontal quartz bell jar cleaner is arranged at the left side in the box body, and the vertical quartz bell jar cleaner is arranged at the right side of the box body; the horizontal quartz bell jar cleaner is divided into an electrical shelf area, a horizontal bell jar cleaning area, a matching parts cleaning area and a liquid storage tank placing area from the top bottom; and the vertical quartz bell jar cleaner is divided into a bell jar twin-fluid spray cleaning area, a liquid recovery area and a liquid storage tank placing area from the top bottom. The combined bell jar cleaner has the advantages of uniform cleaning, better erosion cleaning effect, greatly reducing the probability of machine failure, being safer and reducing cost, and as the motor is not used, the bell jar can not be driven to rotate; and the horizontal quartz bell jar cleaner has good sealing performance, and reduces injuries of an operator caused by liquid splashing, etc.

Description

technical field [0001] The invention relates to epitaxial bell jar cleaning equipment and an operating method thereof in the semiconductor industry, in particular to a combined bell jar cleaning machine and an operating method thereof. Background technique [0002] This combined bell jar cleaning machine is a necessary bell jar cleaning equipment for the semiconductor industry. This equipment is suitable for corrosion cleaning of various epitaxial furnace tubes (quartz bell jars) produced in any country in the world. Cleaning objects such as quartz utensils in the cleaning tank. The current bell jar cleaning machines are divided into vertical type and horizontal type. When cleaning a variety of quartz bell jars for process production, people have to buy washing machines that meet various specifications and sizes of bell jars at the same time, which greatly increases the purchase cost. and daily operating costs. The existing bell jar cleaning machine has the following defec...

AI Technical Summary

Problems solved by technology

The existing bell jar cleaning machine has the following defects: 1) it can only be used alone, which increases the production cost; 2) the uneven cleaning effect is not good, and the motor is used to drive the bell jar to rotate, the corrosion cleaning effect is not good, and machine failure occurs High probability, unsafe, high cost

3) A large amount of corrosive liquid / water resources is used, resulting in high daily use costs; 4) Poor sealing performance during use, it is easy for acid liquid gas to corrode the outer wall of the quartz bell jar, reducing the service life of the bell jar and increasing the cost of the user

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