Controllable doping of SiC single crystal low-dimensional nano material
A low-dimensional nano- and single-crystal technology, which is applied in polycrystalline material growth, single crystal growth, single crystal growth, etc., can solve the problems of SiC single crystal low-dimensional nano-material controllable doping that has not been reported, and achieve high yield High, smooth surface, highly controllable effect
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Embodiment 1
[0034] Weigh a total of 10g of the initial raw material (5wt% aluminum isopropoxide + 95wt% polysilazane), put it into a nylon resin ball mill jar and planetary ball mill it for 12 hours, mix it evenly and place it in a 99 alumina ceramic crucible, N 2 Under the gas protection atmosphere, the temperature was raised from room temperature to 260°C at 10°C / min in a tubular sintering furnace, and kept for 0.5 hours for cross-linking and solidification to obtain an amorphous SiAlCN solid. Put the SiAlCN solid into a nylon resin ball mill jar, add 3wt% FeCl 2 The powder was used as a catalyst in a high-energy ball mill for dry ball milling for 24 hours, and then the SiAlCN powder obtained after the high-energy ball milling was placed in a 99 alumina ceramic crucible, under the protection of a flowing (200ml / min) Ar atmosphere at 0.1MPa In the tube furnace, the temperature was raised from room temperature to 1450 °C at 10 °C / min for high-temperature pyrolysis, kept for 2 hours, and ...
Embodiment 2
[0036] Weigh a total of 10 g of the initial raw material (0.2wt% aluminum isopropoxide+99.8wt% polysilazane), put it into a nylon resin ball mill jar for planetary ball milling for 12 hours, mix it uniformly and put it in a 99% alumina ceramic crucible. 0.1MPa N 2 Under the gas protection atmosphere, the temperature was raised from room temperature to 260°C at 10°C / min in a tubular sintering furnace, and kept for 0.5 hours for cross-linking and solidification to obtain an amorphous SiAlCN solid. Put the SiAlCN solid into a nylon resin ball mill jar, add 3wt% FeCl 2 The powder was used as a catalyst in a high-energy ball mill for dry ball milling for 24 hours, then the SiAlCN powder obtained after the high-energy ball milling was placed in a 99 alumina ceramic crucible, and placed in a 0.1MPa flow (200ml / min) Ar atmosphere under the protection of In the tube furnace, the temperature was raised from room temperature to 1450 °C at 10 °C / min for high-temperature pyrolysis, kept for...
Embodiment 3
[0038] Weigh a total of 10g of the initial raw material (1wt% aluminum isopropoxide + 99wt% polysilazane), put it into a nylon resin ball mill jar and planetary ball mill it for 12 hours, mix it evenly, place it in a 99 alumina ceramic crucible, and place it in a 0.1MPa N 2 Under the gas protection atmosphere, the temperature was raised from room temperature to 260°C at 10°C / min in a tubular sintering furnace, and kept for 0.5 hours for cross-linking and solidification to obtain an amorphous SiAlCN solid. Put the SiAlCN solid into a nylon resin ball mill jar, add 3wt% FeCl 2 The powder was used as a catalyst in a high-energy ball mill for dry ball milling for 24 hours, then the SiAlCN powder obtained after the high-energy ball milling was placed in a 99 alumina ceramic crucible, and placed in a 0.1MPa flow (200ml / min) Ar atmosphere under the protection of In the tube furnace, the temperature was raised from room temperature to 1450 °C at 10 °C / min for high-temperature pyrolys...
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