Silicon micro-resonance type accelerometer

Abstract

The invention discloses a silicon micro-resonant type accelerometer, comprising an upper layer part of the accelerometer formed on the single crystal silicon and a lower layer part of the signal line formed on the glass substrate. The upper layer mechanical structure of the accelerometer is composed of a mass block, a pair of identical resonators and bars. The resonators are vertically and symmetrically disposed in the middle of the mass block. One end of the resonator is connected with the fixed baseplate and another end of the resonator is connected with the mass block by the bar and the mass block is connected with the fixed baseplates by four folded beams. The fixed baseplate is mounted on the fixed basedplate bonding points on the glass substrate, therefore the mechanical structure of the upper layer is hang in the air above the glass substrate of the lower layer. The silicon micro-resonant type accelerometer has features: high sensitivity, good stability and strong resistance to shock.

Description

technical field [0001] The invention belongs to micro-inertia sensor technology in MEMS, in particular to a silicon micro-resonance accelerometer. Background technique [0002] Micro-electro-mechanical systems (MEMS for short) is a multidisciplinary cutting-edge high-tech field developed in recent years. MEMS uses the silicon micromachining technology developed from semiconductor technology, mainly using silicon as the material, to produce a three-dimensional structure on the silicon wafer with a size in the order of microns, suspended and movable, to realize the perception and control of external information, and It can be integrated with signal processing and control circuits to form a multifunctional micro system. Micro-electromechanical systems have the characteristics of small size, low cost, high reliability, and easy mass production. They can be widely used in aerospace, military, communications, biomedicine, and many other fields. They are considered as emerging tec...

AI Technical Summary

Problems solved by technology

The structure is composed of a mass block, a support beam, a tuning fork and a mechanical amplification system. The tuning fork is located in the middle of the mass block and arranged symmetrically up and down adjacent to each other, which overcomes the shortcomings of uneven material and ambient temperature that have a great influence on the device and the low utilization rate of the mass block.

However, the mass block of this structure is supported by two supporting beams in the middle, so the stability and impact resistance of the accelerometer are poor.

In addition, the supporting beam structure of the structure is a cantilever beam, which has poor ability to release residual stress

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