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Preparation of carbon nano-tube array

A carbon nanotube array and carbon source gas technology, applied in nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve problems such as complex equipment, poor laser beam focus, and inability to accurately control laser beam movement. The method is simple and reliable control effect

Active Publication Date: 2008-07-02
TSINGHUA UNIV +1
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  • Abstract
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Problems solved by technology

[0006] However, the existing laser-assisted chemical vapor deposition method for growing carbon nanotubes has the following disadvantages: first, the method generally needs to be carried out in a sealed reaction furnace, and the reaction gas is filled with the entire reaction space, and the equipment is relatively complicated. And it is difficult to make a large-scale reaction furnace for growing carbon nanotube arrays by chemical vapor deposition on large-area glass substrates
Thirdly, the existing methods generally cannot precisely control the movement of the laser beam, and it is easy to fail to achieve the growth of the patterned carbon nanotube array due to the poor focus of the laser beam.

Method used

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Embodiment Construction

[0014] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0015] see figure 1 , the preparation method of the carbon nanotube array in the embodiment of the present invention mainly includes the following steps:

[0016] Step 1: Provide a base.

[0017] In this embodiment, the base material is made of high temperature resistant material. Preferably, the substrate material in this embodiment can also be opaque materials such as silicon, silicon dioxide or metal materials, or transparent materials such as glass and plastic organic materials.

[0018] Step 2: uniformly forming a catalyst layer on a surface of the substrate.

[0019] Formation of the catalyst layer can be accomplished by thermal deposition, electron beam deposition or sputtering. The catalyst layer is made of iron, or other materials, such as gallium nitride, cobalt, nickel and alloy materials thereof. Further, the catalyst layer can be oxidized by...

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Abstract

The invention relates to a preparation method of carbon nanotube arrays. The method comprises the steps: a base is provided; one surface of the base is provided with a layer of catalyst; the mixed gas of carbon source gas and carrier gas flows across the surface of the layer of catalyst; laser beams are focused on the base after passing through a galvanometer scanning system, thus growing the carbon nanotube arrays.

Description

technical field [0001] The invention relates to a method for preparing a carbon nanotube array, in particular to a method for preparing a carbon nanotube array by a laser-assisted chemical vapor deposition method. Background technique [0002] Carbon nanotubes are a new type of one-dimensional nanomaterials discovered in the early 1990s. The special structure of carbon nanotubes determines its special properties, such as high tensile strength and high thermal stability; with the change of the helical mode of carbon nanotubes, carbon nanotubes can exhibit metallic or semiconducting properties. Because carbon nanotubes have an ideal one-dimensional structure and excellent properties in the fields of mechanics, electricity, and heat, they have shown broad application prospects in interdisciplinary fields such as materials science, chemistry, and physics. They are widely used in scientific research and industrial applications. has also received increasing attention. [0003] A...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/02B82B3/00
CPCD01F9/12Y10S977/742Y10S977/843
Inventor 陈卓罗春香姜开利范守善
Owner TSINGHUA UNIV
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