Integrated gate commutated thyristor and method of manufacturing the same
A commutation thyristor and gate commutation technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve the problems of increasing turn-on and turn-off losses, difficulties in etching process, and isolation resistance. Small problems, to achieve the effect of reducing additional loss, reducing additional gate current, and flexible process control
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[0033] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0034] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many ways other than those described here, and those skilled in the art can make similar extensions without departing from the connotation of the present invention. Accordingly, the present invention is not limited to the specific examples disclosed below.
[0035] FIG. 5 to FIG. 11 are cross-sectional diagrams illustrating a method for manufacturing an integrated gate-commutated thyristor according to an embodiment of the present invention. For simplicity, the figure only shows the formation process of a basic GCT unit of the IGCT. As ...
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