6 freedom degree micromotion operating platform

A workbench and degree-of-freedom technology, used in microlithography exposure equipment, photolithography process for patterned surfaces, photolithography process exposure devices, etc. Problems such as poor structural integrity and thick platform body achieve the effect of simple structure, low driving center of mass, and high displacement resolution

Active Publication Date: 2007-11-28
TSINGHUA UNIV +1
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  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Due to factors such as the frictional damping nonlinearity of the support system, the first two types of micro-motion stages cannot meet the requirements of high speed, large load, and high dynamic characteristics of lithography equipment.
The micro-motion table with voice coil motor / air support can meet the requirements of lithography equipment, but it has poor structural integrity, thick table body, high center of mass, etc., and its performance is limited to a certain extent.

Method used

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  • 6 freedom degree micromotion operating platform
  • 6 freedom degree micromotion operating platform
  • 6 freedom degree micromotion operating platform

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Embodiment Construction

[0021] Fig. 1 is a three-dimensional structure diagram of a 6-DOF micro-motion worktable provided by the present invention. The micro-motion worktable includes a micro-motion table base 1 , a micro-motion table stator 2 , and a micro-motion table mover 3 . The micro-motion table has 3 groups of electromagnetic drive units arranged in the horizontal plane, wherein the drive axes of the 2 groups of drive units are parallel but not coincident, the drive axes of the 3rd group of drive units are orthogonal to the first 2 groups, and the drive axes of the 3 groups The electromagnetic drive unit arranged in the horizontal plane realizes the X, Y, θ of the micro-movement table in the horizontal plane z 3 degrees of freedom of movement; each group contains at least one electromagnetic force drive unit, each electromagnetic force drive unit is composed of a planar permanent magnet and a coil polarized in the vertical direction, and the planar permanent magnet is arranged on the effecti...

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Abstract

The invention discloses a 6 freedom degree micromotion bench in ultra precise processing and testing device technical domain, which is characterized by the following: possessing three groups of electromagnetic driving units; arranging in horizontal plane; driving the micromotion bench to X, Y, theta z3 freedom degree move in horizontal plane; arranging three electromagnetic driving units along vertical direction; driving the micromotion bench to Z, theta x and theta y3 freedom degree move. This invention possesses simple structure and higher displacement distinguishability, which can be used to realize 6 freedom degree motions for ultra precise process and check.

Description

technical field [0001] The invention relates to a micro-motion workbench, in particular to a 6-degree-of-freedom micro-motion workbench, which is mainly used in semiconductor photolithography equipment and belongs to the technical field of ultra-precision processing and detection equipment. Background technique [0002] The micro-motion table with high precision and fast response has an extremely important position in modern manufacturing technology, and is regarded as an important symbol of a country's high-tech development level. In ultra-precision machine tools, the ultra-precision micro-motion table is used to compensate the error of the feed system to achieve ultra-precision machining; in the manufacture of large-scale integrated circuits, the ultra-precision micro-motion table is used for micro-positioning in lithography equipment and micro-feeding; in the scanning probe microscope, the ultra-precise micro-motion table is used to measure the surface topography of the s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70725G03F7/70758
Inventor 朱煜汪劲松张鸣李广徐登峰尹文生段广洪贾松涛
Owner TSINGHUA UNIV
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