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Piezoelectric trembler, piezoelectric device and gyro sensor

A piezoelectric vibrating piece and gyroscope technology, applied in the direction of electrical components, impedance networks, etc., can solve problems such as increase, inability to eliminate, and unbalanced stress F1 and F2, achieve CI value suppression, improve vibration balance, and CI value low effect

Inactive Publication Date: 2010-01-06
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, the stresses F1 and F2 transmitted to the base 2 due to the deformation of the respective vibrating walls 3 and 4 are not balanced, so they cannot be eliminated, and become the cause of the displacement in the Z direction or the displacement in the Y direction. increase

Method used

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  • Piezoelectric trembler, piezoelectric device and gyro sensor
  • Piezoelectric trembler, piezoelectric device and gyro sensor
  • Piezoelectric trembler, piezoelectric device and gyro sensor

Examples

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Embodiment Construction

[0039] figure 1 and figure 2 Showing the first embodiment of the piezoelectric device of the present invention, figure 1is its rough top view, figure 2 Yes figure 1 A schematic cross-sectional view along line B-B.

[0040] In the drawing, an example is shown in which a piezoelectric device 30 constitutes a crystal resonator, and the piezoelectric device 30 accommodates a piezoelectric vibrating reed 32 in a package 36 serving as a housing container. For example, the package 36 is formed by laminating a plurality of substrates formed by molding alumina ceramic green sheets (crematic green sheets), which are insulating materials, and then sintering them. Each of the plurality of substrates is formed with predetermined holes inside, thereby forming a predetermined internal space S2 inside when stacked. The internal space S2 is a housing space for housing the piezoelectric vibrating reed 32 .

[0041] The piezoelectric vibrating reed 32 is assembled inside the package 3...

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PUM

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Abstract

The present invention provides a piezoelectric resonator patch and a piezoelectric resonator element for improving vibration balance and reducing CI. The piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.

Description

technical field [0001] The present invention relates to a piezoelectric vibrating piece housed in a package or a case, and a piezoelectric device and a gyro sensor in which the piezoelectric vibrating piece is housed in a package or a case. Background technique [0002] Piezoelectric vibrators are widely used in small information devices including HDD (hard disk drive), portable computers or IC cards, in mobile communication devices such as mobile phones, car phones or paging systems, or in measuring devices such as gyro sensors. Piezoelectric devices such as piezoelectric vibrators and piezoelectric oscillators accommodated inside packages, etc. [0003] Figure 13 It is a schematic plan view showing a simplified and well-known structural example (see Patent Document 1) of a piezoelectric vibrating reed used in such a piezoelectric device. [0004] In the figure, a piezoelectric vibrating piece 1 is formed of, for example, a quartz single crystal, and has a wide base 2 and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/19
Inventor 菊岛正幸
Owner SEIKO EPSON CORP
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