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Piezoelectric resonator element, piezoelectric device and gyro sensor

A piezoelectric vibrating piece and vibrating arm technology, applied in electrical components, impedance networks, etc., can solve problems such as inability to eliminate, unbalanced stress F1, F2, increase, etc., to improve vibration balance, low CI value, CI value inhibiting effect

Inactive Publication Date: 2006-04-26
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

In this way, the stresses F1 and F2 transmitted to the base 2 due to the deformation of the respective vibrating walls 3 and 4 are not balanced, so they cannot be eliminated, and become the cause of the displacement in the Z direction or the displacement in the Y direction. increase

Method used

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  • Piezoelectric resonator element, piezoelectric device and gyro sensor
  • Piezoelectric resonator element, piezoelectric device and gyro sensor
  • Piezoelectric resonator element, piezoelectric device and gyro sensor

Examples

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Embodiment Construction

[0039] 1 and 2 show a first embodiment of the piezoelectric device of the present invention, FIG. 1 is a schematic plan view thereof, and FIG. 2 is a schematic cross-sectional view taken along line B-B in FIG. 1 .

[0040]In the drawing, an example is shown in which a piezoelectric device 30 constitutes a crystal resonator, and the piezoelectric device 30 accommodates a piezoelectric vibrating reed 32 in a package 36 serving as a housing container. For example, the package 36 is formed by laminating a plurality of substrates formed by molding alumina ceramic green sheets (crematic green sheets), which are insulating materials, and then sintering them. Each of the plurality of substrates is formed with predetermined holes inside, thereby forming a predetermined internal space S2 inside when stacked. The internal space S2 is a housing space for housing the piezoelectric vibrating reed 32 .

[0041] The piezoelectric vibrating reed 32 is assembled inside the package 36 and herme...

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PUM

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Abstract

The present invention provides a piezoelectric vibrating piece and a piezoelectric device capable of improving the vibration balance and suppressing the CI value to a low level. It has: a base (51) formed of piezoelectric material; at least a pair of vibrating arms (34, 35) formed integrally with the base and extending in parallel from the base; and formed on each of the vibrating arms and in The long grooves extending in the longitudinal direction and the driving electrodes formed in the long grooves have adjustment structures (61, 62) on each of the above-mentioned vibrating arms for adjusting the imaginary lengths of the vibrating arms relative to those extending in the longitudinal direction. The center line (C1) is the rigidity balance of the left and right structures.

Description

technical field [0001] The present invention relates to a piezoelectric vibrating piece housed in a package or a case, and a piezoelectric device and a gyro sensor in which the piezoelectric vibrating piece is housed in a package or a case. Background technique [0002] Piezoelectric vibrators are widely used in small information devices including HDD (hard disk drive), portable computers or IC cards, in mobile communication devices such as mobile phones, car phones or paging systems, or in measuring devices such as gyro sensors. Piezoelectric devices such as piezoelectric vibrators and piezoelectric oscillators accommodated inside packages, etc. [0003] Figure 13 It is a schematic plan view showing a simplified and well-known structural example (see Patent Document 1) of a piezoelectric vibrating reed used in such a piezoelectric device. [0004] In the figure, a piezoelectric vibrating piece 1 is formed of, for example, a quartz single crystal, and has a wide base 2 and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/19
Inventor 菊岛正幸
Owner SEIKO EPSON CORP
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