Two translational movement and jogging platform with redundancy branched chain

Abstract

The invention provides a two-translation micro-motion platform with redundant branch chains, including a motion platform, a fixed platform, a micro-displacement drive device and two sets of branch chains connected between the two platforms, and is characterized in that: two micro-displacement drive devices They are all installed on a fixed platform. Each group of branch chains includes two branch chains. The driving end of each micro-displacement driving device passes through the elastic moving pair of each branch chain in the first group, the first pair of elastic rotating pairs, The connecting rod and the second pair of elastic rotating pairs are connected with the motion platform; the moving platform also passes through the fifth elastic rotating pair, the first connecting rod, the fourth elastic rotating pair, and the second connecting rod of each branch chain in the second group in sequence. 1. The third elastic rotary pair is connected to the fixed platform; the rotation axes of all the elastic rotary pairs are parallel to each other. The invention introduces redundant branch chains, has higher bearing capacity and greater rigidity, and has high sensitivity and excellent performance.

Description

technical field [0001] The invention belongs to the field of manufacturing technology, and in particular relates to a two-translation micro-motion platform with redundant branch chains. Background technique [0002] With the continuous development and progress of science and technology, the scientific field of human research has penetrated into the microscopic fields that we cannot directly feel, such as medicine, biology, optics, materials and engineering. The objects of work are getting smaller and smaller. Such work must rely on special tools and means. Therefore, the research on micro-motion platforms has become a key technology in the microscopic field. The parallel micro-movement platform using flexible hinges has the characteristics of no friction, no gap, fast response, and compact structure, so it is widely used in micro-operation fields such as chromosome cutting, chip manufacturing, processing and assembly of micro-electromechanical products. [0003] For example...

AI Technical Summary

Problems solved by technology

Although the existing technology can obtain higher stiffness by changing the structural parameters of the micro-motion platform, this often increases the volume of the platform and consumes unnecessary energy when driving to generate relative motion of the flexible hinge.

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