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Safe getter pump of large exhaust speed

A technology of getter pumps and getters, which is applied in the direction of pumps, liquid variable displacement machines, machines/engines, etc., and can solve the problems of inability to fully activate the getter, poor vibration and shock resistance, and weakened gas conductivity, etc. problems, to achieve the effects of saving internal space, improving vibration and shock resistance, and reasonable internal structure design

Active Publication Date: 2009-06-10
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the part where the inner wall of these pumps is close to the getter, the conductivity of the gas is weakened, and the getter cannot be fully activated, which reduces the pumping rate of the pump.
In addition, since the getters used in the existing getter pumps are all fixed to the metal strip by rolling, the getters in this pump have poor vibration and shock resistance, and may drop particles, causing serious damage. as a result of

Method used

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  • Safe getter pump of large exhaust speed
  • Safe getter pump of large exhaust speed

Examples

Experimental program
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Effect test

Embodiment

[0040] 0.35g Zr powder, C powder and LaN i 5 The powder mixture was pressed into tablets (inner diameter 6mm, outer diameter 12mm, height 1.3mm) under a pressing pressure of 280MPa, and then sintered at 900°C for 10 minutes to make a getter tablet, and the getter tablet was supported by a stainless steel rod Things are strung together into a getter string 2, which is installed on the positioning plate 3 of the getter pump. The getter in the metal shell 1 is activated by the baking heating method of the external baking heating device 7, and the getter is activated at 500° C. for 30 minutes. 0.35g Zr powder, C powder and LaN i 5 The powder mixture was compressed into tablets under a compression pressure of 280 MPa.

[0041] By controlling the hydrogen desorption temperature of the hydrogen storage alloy to control the flow into the vacuum chamber (the background vacuum is 2×10 -5 Pa, the volume of hydrogen in the cavity is about 0.5 liters), and the vacuum is maintained by a ...

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PUM

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Abstract

The invention relates to a getter string and the usage of a safe high pumping speed getter pump. The getter string is formed by stringing a plurality of getter pieces on a supporting pole. The getter pump is formed by arraying a plurality of the getter strings evenly on the shell body of the getter pump, an opening is arranged on the shell body as a getter pump opening, and a firing heating device is arranged on the outside of the shell body. The getter pump adopts an external firing heating method to activate the getter in the pump body. The usage and the maintenance are convenient and safe. The internal structure of the pump body is rationally designed, is helpful for evenly heating the getter, can facilitate the gas to diffuse, and can increase the pumping speed.

Description

technical field [0001] The invention relates to an easy-to-operate, safe and high-speed getter pump, which belongs to the field of vacuum technology. It can be used in modern science and technology such as vacuum exhaust, particle accelerator, surface analysis system, laboratory vacuum system, film deposition, vacuum processing system, laser, plasma machine, neutron generator, portable instrument, nuclear fusion device, and universe simulation device. And in the industry, it can increase the vacuum degree of the system, which can make the system stable, reliable and long in life. Background technique [0002] In the 1980s, Beijing General Research Institute of Nonferrous Metals applied for the patent "Wide Activation Temperature Range Getter and Getter Component" (Patent No.: CN85102889), the getter added LaNi to zirconium-graphite 5 , enabling the getter to activate over a wide temperature range. The patent also discloses a getter element, and a method for preparing the g...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/02
Inventor 熊玉华尉秀英秦光荣苑鹏杜军毛昌辉
Owner GRIMAT ENG INST CO LTD
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