Stepping omnibearing nano moving platform and control system control

A mobile platform and control system technology, applied in the fields of nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve the problems of wire interference and the inability of the nano mobile platform to achieve plane omnidirectional motion at the same time, and achieve high precision, simple structure, load big effect

Inactive Publication Date: 2008-05-14
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to overcome the problem that the nano-mobile platform in the prior art cannot simultaneously realize the omni-directional movement of the plane and the wire interference, the object of the present invention is to provide a step-by-step omni-directional nano-mobile platform and its control system. Azimuth nano-motion, and can improve the accuracy and flexibility of the mechanism

Method used

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  • Stepping omnibearing nano moving platform and control system control
  • Stepping omnibearing nano moving platform and control system control
  • Stepping omnibearing nano moving platform and control system control

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Embodiment Construction

[0024] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0025] The nano mobile platform is composed of an upper platform 1 and three groups of piezoelectric drivers. The upper platform 1 and the three groups of piezoelectric drivers are connected by elastic (flexible rotating pair 2) hinges, and the three groups of piezoelectric drivers are symmetrical at 120° along the circumference of the upper platform 1. Arrangement; each group of piezoelectric drivers includes at least one drive unit, and more than two drive units are arranged in series; each drive unit is composed of two piezoelectric ceramics, a beam and a contact element, and the upper ends of the two piezoelectric ceramics are connected to the upper The platform 1 is hinged with elastic (flexible rotating pair 2 ), the lower end is bonded to the crossbeam 5 , and the contact element 6 is bonded to the crossbeam 5 below it.

[0026] Each piezoelectric cera...

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Abstract

The present invention relates to micro device assembling technology, and is especially a kind of stepped omnibearing nanometer moving platform for micro processing, biological cell operation, etc. The stepped omnibearing nanometer moving platform consists of upper platform and three piezoelectric drivers hinged elastically to the upper platform and arranged homogeneously in the periphery of the upper platform. Each of the piezoelectric drivers includes one driving unit, and two or more driving units are connected serially. Each driving unit consists of two piezoelectric ceramics, one cross beam and one contact element. Each of the piezoelectric ceramics is connected to the control circuit and is radio communicated with computer through communication circuit. The present invention can realize omnibearing planar nanometer motion in raised mechanism precision and flexibility.

Description

technical field [0001] The invention relates to micro-device assembly technology, in particular to a stepping planar omni-directional nanometer mobile platform and its control system for micro-processing and biological cell operation. Background technique [0002] Micro-nano mobile platform refers to a micro-motion platform with nano-level motion precision. It is an important part of micro-nano technology and can provide key equipment for nano-scale measurement and nano-scale assembly. [0003] Current nano-mobility mechanisms generally use inchworm mechanisms, inertial impact and inertial friction drive mechanisms. The former two can only achieve single-degree-of-freedom movements. To achieve multi-degree-of-freedom movements of these mechanisms can only rely on the superposition of multiple single-degree-of-freedom mechanisms , so the volume is too large. Although the inertial friction drive mechanism can realize a full range of motion, the load capacity is very small (ab...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B3/00B81B5/00B82B3/00
Inventor 谈大龙朱涛张江波
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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