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Method of Preparing Zinc Oxide Nanorods on a Substrate By Chemical Spray Pyrolysis

Inactive Publication Date: 2008-11-13
TALLINN UNIVERSITY OF TECHNOLOGY
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  • Abstract
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Benefits of technology

[0015]The method of growing nanostructured zinc oxide (ZnO) layers on a substrate according to present invention comprises the steps of heating a substrate to a predetermined temperature, atomizing a solution, comprising a precursor, such as zinc chloride (ZnCl2) or zinc acetate (Zn(CH3COO)2), and a solvent, into small

Problems solved by technology

However, the background art does not suggest that chemical spray pyrolysis can be used for preparing highly structured zinc oxide, namely nanostructured layers comprising ZnO nanorods or nanoneedles, on various substrates.

Method used

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  • Method of Preparing Zinc Oxide Nanorods on a Substrate By Chemical Spray Pyrolysis

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[0056]Several samples of zinc oxide nanocolumnar layers were prepared, whereas the following parameters were varied: growth temperature, stock solution composition, concentration of the precursors in stock solution, solution feeding rate, type of substrate, type of underlayers (metal oxides), and carrier gas flow rate. Samples were studied by the techniques of X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and photoluminescence (PL). The results are shown in FIGS. 1 to 19.

[0057]The solutions were prepared at the room temperature (from about 18 to about 25° C.), but generally, the temperature of the solution is not critical.

[0058]Zinc chloride (pro analysis, Merck) or zinc acetate dihydrate (pro analysis, Merck), thiourea (pro synthesis, Merck), Urea (pro synthesis, Merck), 2-propanol (pro analysis, Merck), Ethanol (pro analysis, Merck), deionized water (with specific resistance 18 MΩ.cm) were used as starting materials.

[0059]A so...

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Abstract

A method of preparing nanostructured zinc oxide layers on a substrate by chemical spray pyrolysis at moderate deposition temperatures from 350° C. to 600° C. is disclosed. An aqueous or aqueous alcoholic solution comprising zinc chloride or zinc acetate as precursors is prepared and sprayed onto the preheated substrate so that the precursor reacts to form zinc oxide layer on the substrate. Thiourea or urea may be also added to the solution. Glass, silicon, or metal oxide covered glass can be used as the substrate.

Description

[0001]This application claims the priority of U.S. provisional application No. 60 / 671,232, filed on 14 Apr. 2005, the disclosure of which is incorporated herein by reference in its entirety.BACKGROUND OF THE INVENTION[0002]1. Technical Field[0003]The invention relates to zinc oxide (ZnO) nanostructures, such as nanorods and nanoneedles, and to a method for manufacturing thereof, and more particularly, to a method of preparing highly structured zinc oxide layers comprising zinc oxide nanorods or nanoneedles, on various substrates by chemical spray pyrolysis (CSP) at moderate deposition temperatures of the substrate (from about 400 to 600° C.).[0004]Such nanorods are individual single crystals with high purity. CSP is technologically simple deposition technique where no costly equipment is needed. Therefore, the invention provides very cheap and simple method, compared to alternative methods, for manufacturing zinc oxide nanostructures.[0005]Zinc oxide is one of the most promising mat...

Claims

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Application Information

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IPC IPC(8): C23C4/10
CPCH01L21/0237H01L21/02554H01L21/02603H01L21/02628C23C18/1291B05D1/02C23C18/1216C23C18/1245C23C18/1258C23C4/105C23C4/11
Inventor KRUNKS, MALLEOJA-ACIK, ILONADEDOVA, TATJANA
Owner TALLINN UNIVERSITY OF TECHNOLOGY
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