Cleaning box and method for cleaning pipe by utilizing the same

Abstract

A cleaning box used to catch the waste materials from a vacuum pipe of a working machine is provided. The present invention is characterized in that the cleaning box includes a catch inlet and an air outlet wherein the catch inlet is connected to the vacuum pipe of the working machine, and the air outlet is connected to an exhaust pipe of an exhaust apparatus. That the cleaning box has high rigidity can prevent the cleaning box from breaking and the waste materials from leaking out of the cleaning box.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a cleaning apparatus, and more particularly, to a cleaning box and a method for cleaning pipe by utilizing the same. [0003] 2. Description of the Related Art [0004] According to the characteristics of the manufacturing process, a heater jacket is commonly used in some working machines, such as: the metal etching machine, for adding heat to the vacuum pipe to prevent the waste materials such as polymer from sticking on the inner wall of the vacuum pipe during the semiconductor fabrication. However, parts of the vacuum pipe not covered by the heater jacket will need to be cleaned from time to time. [0005]FIG. 1 schematically shows a connection diagram of a conventional semiconductor fabricating apparatus. FIG. 2 schematically shows a method for cleaning a vacuum pipe of a working machine in the prior art. [0006] Firstly, the interconnection of a working machine 100, a vacuum pump 106, ...

AI Technical Summary

Benefits of technology

[0011] Therefore, it is an objective of the present invention to provide a cleaning box for holding the waste materials in the connection pipe, so as to prevent the waste materials from leaking.

[0012] It is another objective of the present invention to provide a method for cleaning pipe, the method can effectively clean the waste materials in the connection pipe and prevent the waste materials from leaking.

[0026] It is known from the description above that the cleaning box has high rigidity and good anti-erosion property, which can prevent the cleaning box from breaking and the waste materials from leaking out of the cleaning box. In addition, a transparent plate is disposed on the cleaning box of the present invention, for clearly viewing the process of the waste materials caught by the cleaning box. Moreover, the air outlet is located on the top surface of the cleaning box to effectively prevent the waste materials from stuffing into the exhaust pipe of the exhaust apparatus.

[0027] On the other hand, with the method for cleaning pipe provided by the present invention, the exhaust apparatus can exhaust the dust generated by the waste materials from the cleaning box to the outside of the fabricating system to prevent the dust from leaking. Furthermore, that the pipes in the present invention are connected with the tube connectors can prevent the security issues of the waste materials leaking from the sealing of the pipe.

Problems solved by technology

However, parts of the vacuum pipe not covered by the heater jacket will need to be cleaned from time to time.

However, since the plastic bag 120 is easily ripped, using the plastic bag 120 to catch the waste materials 118 may result in security issues, such as: leaking of the waste materials 118 due to the waste materials 118 being dropped outside of the plastic bag 120.

In addition, since the tightness of the plastic bag 120 is poor, that the waste materials 118 easily leaks from the sealing between the plastic bag 120 and the vacuum pipe 102 has significantly negative impacts on health of the operators.

On the other hand, if the dust leaks from the joint sealing between the plastic bag 120 and the vacuum pipe 102, that the sensor detection point of the smoke alarm will rise and the smoke alarm is activated may cause false alarm.

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