Ultraprecise grinder with two stages of feeding mechanism and its control method

Abstract

The present invention relates to ultra precise numerically controlled grinder with two stages of feeding mechanism and its control method. The grinder includes an ultra precise numerically controlled grinder; a micro feeding bench comprising a piezoelectric driver, a flexible hinge mechanism and a control system; a detection system comprising a position sensor and a size measurer; and an integrated interface system for transmitting the pulse signals to realize the integrated control of the grinder. The grinder has numerically controlling system, and increased micro feeding bench control system, monitoring system and integrated interface system. The present invention is for completing the coarse, semi-precise and precise grinding of high precision parts of optical glass, ceramic and other hard and fragile material.

Description

technical field [0001] The invention belongs to the category of precision machining and its equipment manufacturing industry, and relates to a structure of an ultra-precision grinding machine with a two-stage feeding mechanism and a control method thereof. Background technique [0002] The radome is a large-depth thin-shell structural part. The material is mostly quartz ceramics, which are hard and brittle and have low tensile strength. When machining it, due to the lack of stable and reliable process benchmarks and the selection of inappropriate grinding dosage , the surface is prone to micro-cracks. [0003] When grinding brittle, hard and thin workpieces such as optical glass and ceramic radome, the feed rate of the grinding wheel frame can reach the sub-micron level, which can make the abrasive chips become curled when cutting plastic materials, thereby improving the grinding conditions and improving the surface hardness of the ground surface. Precision and surface qual...

AI Technical Summary

Problems solved by technology

[0005] 1. The mechanical transmission feed accuracy of traditional grinding machines is limited. At present, the minimum feed resolution of the grinding wheel frame of the grinder directly driven by the servo motor and the ball screw pair is 1-0.5 μm, and it is very difficult to be further accurate to 0.2-0.1 μm yes, even impossible

[0006] 2. The response frequency during dynamic compensation is low, which is due to the large mass of the grinding wheel frame and its moving parts, and the crawling of the mechanical transmission mechanism. At present, the performance indicators of the grinding machine do not involve the response frequency of the feed movement

[0007] 3. Although the linear motor feed device has any working stroke, 9.8m / s 2 The above feed acceleration and simple system structure have many advantages, but there are also major disadvantages such as high cost, serious heat generation, complex control system, and unsatisfactory magnetic isolation and antimagnetic effect, which affect the overall performance of the feed system.

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