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Plasma surface processor of multi-capacity coupled radio-frequency

A technology of plasma and capacitive coupling, which is applied in the direction of plasma, sanitary equipment for toilets, circuits, etc., can solve the problems of inability to generate plasma, and achieve the effect of large generation area, fast disinfection and sterilization, and uniform distribution

Inactive Publication Date: 2007-06-20
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] However, the usual radio-frequency low-temperature vacuum plasma discharge uses the radio-frequency electrode as a substrate to form a plasma with higher temperature and density near one side of the radio-frequency electrode, and the discharge is only concentrated on one side of the radio-frequency electrode, especially when the discharge power When small, most of the space in the vacuum chamber cannot generate plasma

Method used

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  • Plasma surface processor of multi-capacity coupled radio-frequency

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Embodiment Construction

[0016] First, please refer to FIG. 1 and FIG. 2 , which are structural schematic diagrams of the radio frequency multi-capacitance coupled plasma surface treatment equipment of the present invention. The device includes a housing 12, a vacuum chamber 14 is installed on the top of the housing 12, a glass observation window 15 is provided on the front of the vacuum chamber 14, a radio frequency power supply 18 and a matching device 17 of a radio frequency power supply are installed in the middle of the housing 12 , vacuum gauge 16 and gas valve 19, castors 20 are installed on the four corners of the bottom of the housing 12, a vacuum pump 13 is placed in the outer space of the housing 12, and the vacuum pump 13 communicates with the vacuum chamber 14 through the exhaust pipe 11.

[0017] Referring to FIG. 2 and FIG. 3 , FIG. 3 is an enlarged schematic diagram of part A of the radio frequency electrode 25 in FIG. 2 . In the middle of the vacuum chamber 14, a flat radio frequency ...

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Abstract

A multiple capacitors coupled RF plasma apparatus for treating and sterilizing the surface of object is composed of a casing, a vacuum chamber, a RF power supply, and a gas pumping in and out system. Said vacuum chamber has a vacuum meter, a gas valve, a vacuumizing pump, a door with observing glass window, RF plate electrode, and symmetrically arranged suspended plate electrode and grounding plate electrode.

Description

technical field [0001] The invention relates to sterilization equipment, which is a new type of radio frequency multi-capacitance coupling plasma surface treatment equipment, especially refers to the glow plasma discharge formed by using multi-capacitor parallel connection in a vacuum chamber to reduce the radio frequency coupling capacitance, so that it can be used for treating Surface treatment of materials and equipment for surface disinfection and sterilization of medical devices. Background technique [0002] In the medical field, with the increasingly wide application of various high-tech medical instruments and equipment, how to sterilize these instruments at low temperature and efficiently sterilize them has become a new problem in the medical field. Traditional high temperature and humidity sterilization can no longer meet the new requirements of fast, efficient, non-corrosive, and non-denaturing. Liquid sterilants, such as glutaraldehyde, are unable to sterilize p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61L2/14H05H1/48H05H1/00H01J37/32
Inventor 王守国
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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