Semi-closed observing environment for electronic microscope

Abstract

The invention is for a kind of semiclosed observing circumstance for electron microscope, includes: a covering, the inside is divided into a capacity room by clapboard, and a gas room that is formed under the capacity room, and a buffer room that is formed under the gas room, the top of the capacity room has one observation hole at least that is designed on the covering, the bottom has one observation hole at least that is designed at the clapboard and is connected to the gas room, the bottom of the gas has one air hole at least that is designed another clapboard and is connected to the buffer room, the bottom of the buffer room has one outer hole at least that is designed on the covering and is connected to the outside, the two observation holes, the air hole and the outer hole are at the same axis, and a thin film is set sealed at the observation hole that is at the upper; there is an injection air hole at least that is designed at one side of the gas room for the covering, additionally there is one air bleeding hole at least at one side of the buffer room for the covering, thereout it can provide an observation environment for electron microscope, and with a clear observation result.

Description

technical field [0001] The invention relates to electron microscopes, in particular to a semi-enclosed observation environment for electron microscopes. Background technique [0002] Press, in the known technology, when operating an electron microscope to observe an object, it is usually limited by the vacuum environment of the sample chamber in the electron microscope, so that the object to be observed must be a non-volatile solid to be observed. If it is a volatile object, such as a liquid or gaseous fluid substance, a large amount of gas will be generated after being placed in the vacuum sample chamber, which will not only cause the electron beam to be unable to pass through the object for diffraction or imaging experiments, but also cause the electron gun of the microscope to be high. The vacuum in the vacuum area drops or causes contamination, which damages the electron microscope. [0003] It can be seen from the above that, limited by the limitation of the vacuum env...

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Problems solved by technology

However, its disadvantage is that it is impossible to maintain the pressure of the sample chamber close to normal pressure or higher pressure for observation and analysis, because the liquid will evaporate quickly to maintain a stable state of liquid-gas balance, so it must be continuously replenished into the sample chamber. The sample room, but this will cause serious flow of the sample to be observed or uneven mixing of old and new samples, which will affect the authenticity of the observation

In addition, a large amount of volatilized high-pressure steam or high-pressure gas injected into the gas chamber area from the outside will fill the entire space between the upper and lower pole pieces, which will also cause the multiple scattering effect of electrons due to the collision of a large number of gas molecules to become very serious, resulting in the failure of the electron beam Smooth imaging or experiments with electron diffraction

At the same time, the design of the sample chamber cannot effectively control the amount of injected liquid, so it is very easy to cause the thickness of the liquid to be too thick, so that the electron beam cannot penetrate the sample, resulting in the failure of observation and analysis

[0005] At the same time, its design still requires dismantling the main body of the microscope to install these parts, so the possibility of mass production is not high

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