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Touch sensor and its manufacture method

A tactile sensor and tactile technology, applied in the field of tactile sensors, can solve problems such as low spatial resolution and difficult production, and achieve the effects of enhanced robustness, simple structure, and reduced cost

Inactive Publication Date: 2007-05-23
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the shortcomings of the existing tactile sensor, such as hard substrates that cannot be attached to curved surfaces for measurement, difficult fabrication, and low spatial resolution, the present invention combines micro-electromechanical systems (MEMS) technology with flexible materials, and proposes a A flexible switch type micro-tactile sensor and a simple, efficient and low-cost method for making such a tactile sensor

Method used

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  • Touch sensor and its manufacture method
  • Touch sensor and its manufacture method
  • Touch sensor and its manufacture method

Examples

Experimental program
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Embodiment 1

[0038] Referring to FIG. 2, FIG. 3, FIG. 4, and FIG. 5, this embodiment is a flexible switch type micro-tactile sensor with an array of 8×8 sensitive cells, including a tactile contact layer 1, a spacer layer 2, and a substrate layer 3. Both the tactile contact layer 1 and the substrate layer 3 are made of silicon rubber, and the material of the spacer layer 2 is polyimide. The upper surface of the tactile contact layer 1 has an array of 8×8 micro-protrusions, and each micro-protrusion is a sensitive point where the sensor contacts the object to be measured. The spacer layer 2 is located between the tactile contact layer 1 and the substrate layer 3 , and forms an 8×8 cavity array at the position corresponding to the micro-protrusions on the upper surface of the tactile contact layer 1 .

[0039] There are 8 rows of row electrodes 4 arranged in parallel on the direct contact surface between the tactile contact layer 1 and the spacer layer 2, and 8 rows of column electrodes 5 ar...

Embodiment 2

[0054] Referring to FIG. 6 and FIG. 7 , this embodiment is a flexible switch micro-tactile sensor with 7×10 sensitive cell arrays, including a tactile contact layer 1 , a spacer layer 2 , and a substrate layer 3 . The materials of the tactile contact layer 1 , the spacer layer 2 and the substrate layer 3 are all polyimide. The upper surface of the tactile contact layer 1 has a 7×10 micro-protrusion array, and each micro-protrusion is a sensitive point where the sensor contacts the object to be measured. The spacer layer 2 is located between the tactile contact layer 1 and the substrate layer 3 , and forms a 7×10 cavity array at the position corresponding to the micro-protrusions on the upper surface of the tactile contact layer 1 . There is a concave ring around the periphery of each micro-protrusion, and the structure of the concave ring makes the micro-protrusion easier to deform, thereby improving the sensitivity.

[0055] On the direct contact surface of the tactile conta...

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Abstract

The invention relates to a method for producing touch sensor, wherein said sensor comprises touch contact layer 1, space layer 2, and substrate layer 3 while they are made from flexible material; the touch contact layer 1 has micro cam array above; the space layer 2 is between the layers 2 and 3, while it has chamber array relative to the micro cam array; the contact faces between layers 1, 3 and 2 have several parallel row electrodes 4 and longitudinal electrodes 5 while they are vertical to each other; each crossed part has one switch sensitive unit; when the force of units are different, it will generate different switch signals to represent the surface state of matter. The invention has simple structure, high spatial resolution, and low cost.

Description

technical field [0001] The invention belongs to the technical field of mechatronics, and in particular relates to a tactile sensor applied to mechatronics measurement technology, and also relates to a manufacturing method thereof. Background technique [0002] The sense of touch is a synthesis of mechanical stimuli such as contact, impact, and pressure. A tactile sensor is a device that measures the interaction parameters (tactile, pressure, force, slip, thermal, etc.) of its own sensitive surface and external objects. The sensitive surface contains many tactile sensitive elements arranged in an array. Tactile sensors can be used for surface distributed contact measurement, shape recognition, surface height relief discrimination, active tactile perception, etc. [0003] Traditional tactile sensors have been difficult to commercialize due to material and process limitations. The lack of flexibility of hard materials such as silicon and metal is one of the main reasons why t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B81C1/00B81C3/00G01B7/28
Inventor 马炳和苑伟政王艳
Owner NORTHWESTERN POLYTECHNICAL UNIV
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