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Method for surface metal coating of flexible strip-like articles and dedicated device therefor

A technology of surface metal and special equipment, applied in metal material coating process, sputtering plating, ion implantation plating and other directions, can solve the problems of not allowing tensile deformation, unsuitable for plating, and unable to withstand higher temperatures , to achieve the effect of eliminating the influence of temperature rise, low cost and good plating permeability

Inactive Publication Date: 2006-11-22
HEZE TIANYU TECH DEV CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for some flexible strip materials, it is not allowed to be stretched and deformed during the coating process, and it cannot withstand high temperatures, so the existing winding evaporation coating machines and magnetron sputtering coating machines are not suitable. Plating such materials

Method used

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  • Method for surface metal coating of flexible strip-like articles and dedicated device therefor
  • Method for surface metal coating of flexible strip-like articles and dedicated device therefor
  • Method for surface metal coating of flexible strip-like articles and dedicated device therefor

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Experimental program
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Effect test

Embodiment 1

[0019] Depend on figure 1 It can be seen that the present invention is mainly composed of the following parts: vacuum chamber 13, target gate, transmission gate and vacuum system.

[0020] In order to make the vacuum chamber 13 rapidly reach the requirement of vacuum degree and keep the vacuum degree uniform, a set of vacuum system is respectively arranged on both sides of the housing, which is composed of mechanical pump 10, Roots pump 9, diffusion pump 11 and valves, etc. Conventional high vacuum system composed of accessories.

[0021] Depend on figure 1 It can be seen that, except that the vacuum system is installed on both sides, the casing of the present invention also has a transmission moving door 14 and a target moving door 12. For the convenience of operation, the magnetron sputtering target is installed on the target moving door 12, And the coiling mechanism of plated object is then installed on the transmission mobile door 14, and housing is provided with the sea...

Embodiment 2

[0027] The object to be plated 8 starts from the unwinding shaft 5, passes through the guide shaft, then is wound on the winding shaft 5 by the traction shaft 1, and then passes through the transition shaft 2. In the sputtering area, two sets of targets 4 are used to sputter and coat both sides of the object to be plated 8 at the same time, and the metallization coating on both sides of the object to be plated 8 is completed at one time.

[0028] The power of the embodiment of the present invention is 80-100 kilowatts, the voltage is 400-600 volts, and the linear velocity of the coating film is 0.5-10 m / min. It can plate all kinds of flexible strip materials with a width of 500-2000mm and a thickness of 0.05-10mm.

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Abstract

The invention discloses a flexible strip-typed surface metal deposition method and specific equipment, which is characterized by the following: the deposited material is started from scroll, which is coiled on the material received shaft through guide shaft and drawing shaft; the deposited material is sprayed and deposited on two surfaces by two target electrodes through target electrode spraying region; the specific equipment comprises vacuum chamber and vacuum system in connection with vacuum chamber; the target electrode moving door and driving moving door are set on the vacuum chamber; the magnetic control spraying target electrode is set on the target electrode moving door, which contains coiling structure for the deposited material.

Description

(1) Technical field [0001] The invention relates to a method for metal coating on the surface of a flexible strip and its special equipment, in particular to a winding-type magnetic sputtering coating machine and a process for using the coating machine to perform metal coating on the surface of a flexible strip. (2) Background technology [0002] Flexible strip metal products and surface metal coating products are widely used in modern industry. For example, nickel foam and nickel-plated steel strips are used to make high-performance battery electrode plates. Since the foam nickel itself is porous, the surface area formed is large. Therefore, it can fully contact with the battery liquid, so that the performance of the battery is greatly improved. Another example: aluminum foil paper for packaging and coated cloth for shielding are widely used in daily life and electronic and electrical engineering. [0003] In the flexible strip coating production process, the most critical...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/54C23C14/56
Inventor 毕研文王乃用宋小斌张强江衍勤
Owner HEZE TIANYU TECH DEV CO LTD
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