Energy dispersion type X-ray diffraction/spectral device

Abstract

A white X-ray generating means (2) and an X-ray detecting means (3) are respectively moved to a first position (shown by a solid line in the Fig.) and a second position (shown by a one-dot-chain line in the Fig.) that are separated, X-ray intensities, for each energy, detected at respective positions by the X-ray detecting means are obtained as first data and second data, a third data, that is refraction-X-ray-only data, is obtained based on the difference between the first data and the second data, and data about fluorescent X-ray is obtained from the difference between the first or second data and the third data.

Description

technical field [0001] The present invention relates to an energy dispersion type X-ray diffraction / spectrometer that uses continuum X-rays and simultaneously detects diffracted rays and fluorescent X-rays with an X-ray detector installed. Background technique [0002] An X-ray diffractometer is generally referred to as an instrument that uses X-rays to analyze the crystal structure of a sample. An X-ray diffractometer is constituted by an X-ray generator arranged at a position capable of irradiating the sample surface at an angle of θ and an X-ray detector such as an image counter arranged at a position where the irradiation direction and the sample measurement point form an angle of 2θ, And the X-ray diffractometer irradiates the sample with X-rays of a known single wavelength λ by sequentially rotating and moving the X-ray generating device and the X-ray detecting device and measures the intensity of the X-rays at the angle θ, that is, the diffraction intensity. [0003]...

AI Technical Summary

Problems solved by technology

[0015] However, separation of diffracted rays from fluorescent X-rays is achievable when the fluorescent X-ray emission area is limited, whereas such separation is impossible when there are many areas where fluorescent X-rays are generated. Furthermore, in order to find The proper angle to change from one specimen to another must be precisely changed in 2θ, which still creates the problem of complicating the construction of the measuring device

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