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Nanometer structure micro mechanical biochemical sensor

A technology of biochemical sensors and nanostructures, applied in instruments, analytical materials, fuel oil testing, etc., can solve the problems of low sensitivity, slow adsorption rate, poor accuracy, etc., and achieve the effect of improving sensitivity and accuracy

Inactive Publication Date: 2006-06-28
TSINGHUA UNIV
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Problems solved by technology

[0004] The disadvantage of the existing micro-mechanical structure sensors for detecting explosives is that the material used to make the micro-mechanical structure has a very slow adsorption rate for explosive gas, and the typical adsorption rate for TNT is 10 per second. -12 Gramweight
Therefore, the detection time is long, the sensitivity is low, and the accuracy is poor

Method used

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  • Nanometer structure micro mechanical biochemical sensor
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Embodiment Construction

[0015] The invention provides a nanostructure micromechanical biochemical sensor with high sensitivity and simple structure for detecting various gases including explosive gas. The design mechanism of the present invention is: the nano-material grown on the micro-mechanical structure absorbs explosive gas, and the applied pulse voltage rapidly heats the nano-material adsorbed explosive gas through the heating resistance, so that the temperature exceeds the explosion of molecules such as explosives. Points, detonate explosive molecules and other gases, the explosion causes deformation of the micro-mechanical structure, use optical methods, capacitance, piezoelectric or piezoresistive methods to detect the deformation to obtain the output signal of the sensor, and realize the detection of explosive gas. The micromechanical structure can be prepared using SOI silicon wafers, and the resistance for heating nanomaterials and the piezoresistor for detecting sensor deformation are all...

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Abstract

A micromechanical biochemical transducer of nanostructure is prepared as setting micro suspension ¿C arm on SOI silicon base, coating silica insulation layer on said arm with its top layer being heating resistance prepared by single ¿C crystal silicon, coating nanomaterial on heating resistance, connecting nanomaterial heating unit to heating resistance by leading wire, setting laser generator and transducer output signal detection unit of position sensitive detector above micro suspension ¿C arm.

Description

technical field [0001] The invention belongs to the scope of micro-processing technology and micro-detection devices, in particular to a nano-structured micro-structure for detecting various gases including explosive gas and adopting micro-processing technology to grow or deposit nano-materials on a micro-mechanical structure. Mechanochemical sensors. Background technique [0002] Explosive detection is an area that modern science and technology needs to develop urgently. It plays an important role in the fields of national defense and anti-terrorism, especially the detection of explosive gas, which is more and more important because of its difficulty in detection. At present, the sensors used to detect explosives, such as ion mobility spectroscopy, nuclear resonance, etc., but the sensors using the above technologies have some disadvantages such as large size, high cost, and inability to miniaturize; the most important and effective detection method for explosive gases Pol...

Claims

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Application Information

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IPC IPC(8): G01N33/22G01N5/02G01N25/54G01N35/00
Inventor 王喆垚周有铮庄志伟刘理天
Owner TSINGHUA UNIV
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