Robot simulation device, and robot simulation program
一种自动机械、仿真装置的技术,应用在机械手、程序控制、程序控制装置等方向,能够解决看不见干扰状态等问题
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[0046] Hereinafter, although the present invention will be described with reference to the accompanying drawings, the present invention is not limited to the following embodiments, and automatic machine movement can be instructed in a similar environment. Next, the wafers are taken out from the wafer cassettes arranged around the transfer chamber by the robot arranged in the transfer chamber, transported to the load lock chamber connected to the processing chamber, and the processed wafers are returned. A device for simulating the operation of a robot in the case of this operation of a wafer cassette will be described as an example.
[0047] figure 1The apparatus structure of the simulation apparatus 100 of this invention is shown. Possess: input part 2, set working area, input various elements (size, shape, etc.) of automatic machine, working condition etc.; As the central computer 6, for example, a personal computer equipped with Windows (Windows) 2000 as an OS may be used...
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