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Robot simulation device, and robot simulation program

一种自动机械、仿真装置的技术,应用在机械手、程序控制、程序控制装置等方向,能够解决看不见干扰状态等问题

Inactive Publication Date: 2006-04-12
RORZE CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, it is difficult to easily select and design an appropriate working space, robot size, etc., because a large computer is used in the conventional simulation device, and the interference state cannot be seen on the screen.

Method used

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  • Robot simulation device, and robot simulation program
  • Robot simulation device, and robot simulation program
  • Robot simulation device, and robot simulation program

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0046] Hereinafter, although the present invention will be described with reference to the accompanying drawings, the present invention is not limited to the following embodiments, and automatic machine movement can be instructed in a similar environment. Next, the wafers are taken out from the wafer cassettes arranged around the transfer chamber by the robot arranged in the transfer chamber, transported to the load lock chamber connected to the processing chamber, and the processed wafers are returned. A device for simulating the operation of a robot in the case of this operation of a wafer cassette will be described as an example.

[0047] figure 1The apparatus structure of the simulation apparatus 100 of this invention is shown. Possess: input part 2, set working area, input various elements (size, shape, etc.) of automatic machine, working condition etc.; As the central computer 6, for example, a personal computer equipped with Windows (Windows) 2000 as an OS may be used...

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PUM

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Abstract

A robot simulation device capable of simulating whether or not a robot carrying a carried object in a working area where obstacles are disposed performs an operation in the working area without any interference, comprising an input part, a display part, a calculation part, a calculation program part, a teaching program output part, and such means as (1) a two-dimensional display part having coordinate axes, (2) means for drawing, on the display part, the obstacles and working area, for drawing the moving robot, and for drawing the carried object carried by the robot, (3) a means for interpolating moving through-points by designating the moving through-points for the center point of the carried object, (4) a means for displaying a moving route for the carried object to move in the working area, and (5) a means for displaying an area where the moving route interferes with the obstacles.

Description

technical field [0001] The present invention relates to a computer simulation device and its application program, which are used to pre-verify whether there is interference with the surrounding environment when the conveyed object is conveyed by automatic machinery such as a conveyer. [0002] In more detail, it relates to an apparatus for transporting semiconductors, liquid crystal displays, plasma displays, organic electroluminescence displays, inorganic electroluminescence displays, field emission displays, etc., using a scalar robot as a robot and It is a program that simulates the movement trajectory of the robot and the thin plate when it is a thin plate such as a substrate, and outputs instructions to the actual robot. Background technique [0003] As a robot simulation device, JP-A-05-224734 discloses a simulation device that superimposes and displays the robot at a predetermined position and posture on a screen displaying the working environment of the robot. The d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J9/22G05B19/42B25J9/16G05B19/4069G06F9/455
CPCB25J9/1671G05B2219/40317B25J9/1666Y02P90/02G06F9/455B25J9/16G05B19/42
Inventor 细川博文藤井诚一
Owner RORZE CORP
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