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Piezoelectric ceramic, piezoelectric element, and manufacturing method thereof

A manufacturing method and technology of piezoelectric ceramics, which are applied in the manufacture/assembly of piezoelectric/electrostrictive devices, electrical components, piezoelectric devices/electrostrictive devices, etc. The effect of firing temperature

Active Publication Date: 2005-11-30
TDK CORPARATION
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  • Abstract
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  • Claims
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Problems solved by technology

[0010] In addition, in order to lower the firing temperature, when additives other than Pb, Zr, and Ti are added to the piezoelectric ceramics of the above-mentioned prior art, or a part of Pd is replaced with other elements, the piezoelectric ceramics that do not perform these operations are in phase. ratio, there is a tendency that the piezoelectric characteristics tend to be lowered

Method used

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  • Piezoelectric ceramic, piezoelectric element, and manufacturing method thereof
  • Piezoelectric ceramic, piezoelectric element, and manufacturing method thereof
  • Piezoelectric ceramic, piezoelectric element, and manufacturing method thereof

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Embodiment

[0090] Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.

[0091] [Production of Piezoelectric Ceramics]

[0092] (Production example 1)

[0093] conduct Figure 4 In the steps S11 to S16 and S17 to S20 shown, various piezoelectric ceramics are manufactured.

[0094] That is, first, the composition after glaze firing is Pb 0.993 (Ti 0.47 8Zr 0.522 )O 3 The amount of weighing the main component Pb 3 o 4 、TiO 2 and ZrO 2 , meanwhile, weigh 0.5% by mass of WO relative to the main component 3 . They were mixed with a ball mill to obtain a raw material mixture. In addition, at this time, the value of the average particle diameter is varied within the range of 0.4 to 1.0 μm, and at the same time, the value of (cumulative 90% particle diameter − cumulative 10% particle diameter) is varied within the range of 0.3 to 0.6 μm. , prepared various raw material mixtures.

[0095] ...

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Abstract

The objective of the invention is to provide a method for producing a piezoelectric ceramic and a piezoelectric element where their burning temperatures can be sufficiently lowered without adding an additive or the like, a method for lowering burning temperature at a burning step in piezoelectric ceramic production and the piezoelectric element which can be obtained by the methods. The method for producing the piezoelectric ceramic comprises a mixing step to prepare a powdery raw material mixture being mixed with a raw material containing Pb, Zr and Ti and a burning step to burn the raw material mixture. The raw material mixture being satisfied with the following equations denoted as D50<=0.6 [mu]m (1) and D90-D10<=0.4 [mu]m (2) (wherein, D50 is a mean particle diameter; D90 is a 90% cumulation particle diameter; D10 is a 10% cumulation particle diameter) is prepared at the mixing step.

Description

technical field [0001] The present invention relates to a method of manufacturing piezoelectric ceramics and a piezoelectric element, a method of reducing the firing temperature in a firing step in the manufacture of piezoelectric ceramics, and a piezoelectric element. Background technique [0002] Piezoelectric ceramics made of composite oxides containing Pb (lead), Zr (zirconium) and Ti (titanium) have excellent piezoelectric properties, processability and mass productivity, so they are widely used in piezoelectric applications. Piezoelectric elements such as actuators, piezoelectric horns, sounding bodies or sensors. As a method for producing piezoelectric ceramics, there is known a method of heating a raw material mixture such as metal oxides containing the above-mentioned elements and firing (bisque firing), and then firing (glaze firing) at a higher temperature. . [0003] In order to obtain excellent piezoelectric characteristics of piezoelectric ceramics, for examp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/622C04B35/49C04B35/491H01L41/083H01L41/09H01L41/187H01L41/22H01L41/257H01L41/27H01L41/273H01L41/333H01L41/39H01L41/43
Inventor 佐佐木诚志
Owner TDK CORPARATION
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