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High-diffraction efficiency quartz transmission grating of 1053 nano wavelength

A diffraction efficiency, transmission grating technology, applied in the field of gratings

Inactive Publication Date: 2005-11-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

But as far as we know, no one has given the design parameters of high-density deep-etched rectangular gratings for the commonly used wavelength of 1053 nm

Method used

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  • High-diffraction efficiency quartz transmission grating of 1053 nano wavelength
  • High-diffraction efficiency quartz transmission grating of 1053 nano wavelength
  • High-diffraction efficiency quartz transmission grating of 1053 nano wavelength

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Embodiment Construction

[0017] see first figure 1 , figure 2 with image 3 , the high diffraction efficiency quartz transmission grating of 1053 nm wavelength of the present invention is a high-density rectangular grating, characterized in that the line density of the grating is 895-965 lines / mm, the depth of the grating is 1.9-2.1 microns, and the duty ratio of the grating is for 1 / 2.

[0018] The line density of the grating is 920 lines / mm, and the depth of the grating is 2 microns.

[0019] The grating of the present invention is a high-density rectangular grating manufactured by micro-optical technology. image 3 The shown device records the grating in holographic recording mode: He-Cd laser (wavelength 0.441 μm) emits two beams of plane waves to form an interference field on the substrate at an angle of 2θ. We use a glass plate coated with MICROPOSIT series 1818 photoresist as the recording substrate, ∧ represents the spatial period of the grating, that is, the distance between adjacent str...

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Abstract

A quartz transmission grating of high efficiency of diffraction is a high density, rectangle quartz grating of deep eclipse. The grating's wave-length is 1053 nms and its line density 895-965 lines / millimeter. Its depth is 1.9-2.1 micron while the ratio of the filled space to empty space by the grating is 1 / 2.The invention can make the efficiency of +1 class Prague transmission and diffraction in the partial vibration directions of TE and TM be more than 85% at the same time. It realizes free choice of partial vibration model. Especially when the grating density is 920 lines / millimeter and the grating depth is 2 micron, each efficiency of TE and TM partial vibration is more than 94%. The invention is produced by the micro-electronics light chiseling craft and the deep eclipse craft. Its cost is low and it is suitable for volume-produce.

Description

technical field [0001] This patent relates to a grating, especially a high-diffraction-efficiency transmission grating with a wavelength of 1053 nanometers, a high-density rectangular deep-etched quartz grating. Background technique [0002] Holographic gratings and blazed gratings are two types of traditional gratings: holographic gratings are formed by recording the interference fringes of two beams of light on a photosensitive film layer; blazed gratings are formed by mechanical scribing. These two gratings are surface gratings, which do not have the Bragg effect of volume gratings, so the diffraction efficiency is low. After the metal reflective film is coated on the surface, the efficiency will be improved to a certain extent, but the reflectivity of the metal film layer is fixed and limited. , so it is impossible to increase infinitely. [0003] Rectangular deep etched grating is a grating with deep groove shape processed on the substrate by microelectronic deep etchi...

Claims

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Application Information

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IPC IPC(8): G02B5/18
Inventor 周常河张妍妍
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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