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Magnetic sensing device, method of forming the same, magnetic sensor, and ammeter

一种磁检测元件、磁传感器的技术，应用在电气元件、测量电变量、电压/电流隔离等方向，能够解决可靠性下降、不理想等问题，达到减少偏移值、抑制1/f噪声、提高灵敏度和稳定性的效果

Active Publication Date: 2005-08-24
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This increase in 1 / f noise is not ideal because it is a major factor that reduces the reliability of the entire system.

Method used

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  • Magnetic sensing device, method of forming the same, magnetic sensor, and ammeter
  • Magnetic sensing device, method of forming the same, magnetic sensor, and ammeter
  • Magnetic sensing device, method of forming the same, magnetic sensor, and ammeter

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Embodiment Construction

[0062] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0063] [First Embodiment]

[0064] First, refer to figure 1 ˜ FIG. 5 illustrate the structure of the magnetic detection element as the first embodiment of the present invention.

[0065] figure 1 It is a figure which shows the schematic structure of the magnetic detection element 10 of this embodiment. figure 1 (A) shows the planar structure of the magnetic detection element 10, figure 1 (B) means figure 1 (A) The cross-sectional structure of the magnetic detection element 10 in the arrow direction of the cut line IB-IB shown. figure 1 (C) means with figure 1 (A) The corresponding equivalent circuit. The magnetic detection element 10 detects the presence and magnitude of a magnetic field (external magnetic field) in its environment.

[0066] like figure 1 As shown in (A), in the magnetic detection element 10 , the laminated body 20 and the bia...

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Abstract

The present invention provides a magnetic sensing device capable of stably sensing a signal magnetic field with high sensitivity by suppressing occurrence of a hysteresis to reduce 1 / f noise. A magnetic sensing device has a stacked body including a pinned layer having a magnetization direction pinned to a predetermined direction (Y direction), a free layer having a magnetization direction which changes according to an external magnetic field and, when the external magnetic field is zero, becomes parallel to the magnetization direction of the pinned layer, and an intermediate layer sandwiched between the pinned layer and the free layer. Consequently, as compared with the case where the pinned layer and the free layer have magnetization directions which are orthogonal to each other when the external magnetic field is zero, variations in the spin directions of magnetic domains in the free layer can be reduced. In the case of passing read current, appearance of a hysteresis in the relation between a change in the external magnetic field and a resistance change can be suppressed. As a result, 1 / f noise is suppressed and a signal magnetic field can be stably sensed with high sensitivity.

Description

technical field [0001] The present invention relates to a magnetic detection element capable of detecting changes in a signal magnetic field with high sensitivity, a method for forming the same, and a magnetic sensor and an ammeter equipped with such a magnetic detection element. Background technique [0002] In general, a magnetic recording and reproducing device for writing and reading magnetic information to and from a recording medium such as a hard disk is equipped with a thin-film magnetic head including a magnetic recording head and a magnetic reproducing head. Among them, the reproduction head has a giant magnetoresistance effect element (hereinafter referred to as a GMR element) for reproducing a digital signal as magnetic information by utilizing the so-called giant magnetoresistance effect (Giant Magnet-Resistive Effect). [0003] GMR elements used in thin film magnetic heads generally form Figure 19 A rotary valve structure as shown. Specifically, it is a lamin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R15/20G01R33/09G11B5/39H01F10/32H01F41/30H01L43/08H01L43/10
CPCH01F10/3268H01F41/302G01R33/093B82Y25/00G11B5/3903G01R15/205
Inventor 庄司茂
Owner TDK CORPARATION
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