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Method for preparing functional gradient material using metal organic chemical vapor-phase deposition method

A functionally graded material and metal-organic chemistry technology, applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problems of large material porosity, low interlayer bonding force, low mechanical strength, etc., to achieve High deposition rate, excellent performance, and good step coverage

Inactive Publication Date: 2005-08-03
SOUTHWEST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Various physical vapor deposition methods such as self-propagating high-temperature synthesis (SHS), plasma spraying, and laser cladding have complex equipment and large investment; the prepared materials have large void ratios, low mechanical strength, and low interlayer bonding. , easy to peel off, and some are limited to a certain scope of application

Method used

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  • Method for preparing functional gradient material using metal organic chemical vapor-phase deposition method
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  • Method for preparing functional gradient material using metal organic chemical vapor-phase deposition method

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Experimental program
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Effect test

Embodiment 1

[0051] Embodiment 1: Preparation of Mo / Fe series functionally graded material by MOCVD method

[0052] 1. Design of Mo / Fe functionally graded materials

[0053] 1) Thermal and physical properties of Fe and Mo: The Mo / Fe system graded functional material has molybdenum on one side, iron on the other side, and a molybdenum-iron composite layer with a gradual transition in composition in the middle. Its advantage is that it can well alleviate the huge thermal stress caused by the difference in physical properties between molybdenum and iron, and has good mechanical properties, electrical and thermal conductivity, ablation resistance, and thermal fatigue resistance on the whole, making it able to Withstand large thermal fluctuations and mechanical stress, and can give full play to the respective characteristics of molybdenum and iron components. In addition, the composition distribution and organizational structure of this FGM material tend to be rationalized, which greatly reduc...

Embodiment 2

[0089] Embodiment 2: MOCVD method prepares metal-ceramic (Mo / SiO 2 ) functionally graded material

[0090] 1. Analysis model and composition design

[0091] SiO 2 The thermal and physical properties of Mo and Mo are shown in Table 6. It can be seen from Table 6 that SiO 2The physical properties are very different from those of Mo, especially the mismatch of thermal properties, which will cause great thermal stress between discontinuous gradient layers. The inverse design idea of ​​functionally graded materials (FGM) can solve this problem, because the design of reasonable gradient layer and composition is conducive to the smooth transition of material structure and performance. In the design, we assume that Mo / SiO 2 The functionally graded material consists of five layers, and each layer is made of uniform SiO 2 and Mo, the surface layer is pure metal Mo, and the bottom layer is pure ceramic Sio 2 , with a transition layer in the middle. According to the design idea an...

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Abstract

The present invention relates to metal organic chemical vapor deposition (MOCVD) method of preparing functional gradient material. The method includes first inverse design of optimizing components of the functional material, calculating physical property and thermodynamic simulation; and then preparing the metal-metal, metal-ceramic or other functional gradient material in MOCVD process with material source of Fe(CO)5, Mo(CO)6, Si(OC2H5)4 and other organic compounds, in regulated reaction gas source pressure and flow rate, substrate temperature 400-600 deg.c and pressure 170-350 Pa, and controlled deposition condition for each layer. The prepared functional gradient material has stable material phase, continuously changed composition, homogeneous and compact transition layer structure and crystal distribution, high heat shock resistance, etc.

Description

technical field [0001] The invention belongs to the technical field of new materials. It specifically relates to a method for preparing functionally graded materials. Background technique [0002] Functional Graded Materials (FGM) is a new type of material whose composition, structure, structure, density and functional properties are not uniform macroscopically but gradually change. It is based on computer-aided material design and adopts advanced material composite technology to make the elements (composition, structure) of the material change continuously from one side to the other along the thickness direction, so that the properties and functions of the material are also presented. New materials with gradient changes. It has many advantages over the heat-insulating heat-resistant composite materials widely used at present, such as eliminating the interface between materials, relieving thermal stress, having high mechanical strength, thermal shock resistance and high te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/02C23C16/52
Inventor 章娴君张庆熙郑慧雯
Owner SOUTHWEST UNIV
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